A Microelectronic Processing Lab Course Designed to Stimulate Interdisciplinary Team Learning

电子材料处理的教育活动是科罗拉多矿业学院本科课程的一个新的和不断增长的组成部分。这种扩张是多学科的性质，在校园里至少有四个部门大量参与增长。它还得到了行政部门的大力支持，招聘了在这一领域具有专门知识的新教师，建造了新设施，并制定了新的课程。尽管如此，该计划有一个电子材料加工实验室类的迫切需要，为学生提供动手经验与设备制造中涉及的步骤。本提案的目标是获得开发本实验课程所需的关键加工设备。本课程的主要目标是使本科生对半导体器件的生产过程有一个基本的了解。同样重要的是将重点放在发展团队精神和沟通技能，在一个跨学科的环境。实验活动将由来自四个不同部门的高年级学生进行。实验室项目的设计将从各个团队成员的不同人才中汲取经验。由于拟议的实验将相对简单，学生将被允许帮助设计自己的实验，而不仅仅是遵循加工配方。通过口头和书面媒介将个人项目结果传达给同学将是课程的一个重要方面。由于设备处理带来了化学，物理，材料科学和工程方面一起在一个非常明显的应用，该课程将提供一个创新的媒介，强调多学科教育的价值。该课程还将提供学生所接受的课堂教学与每天影响他们的技术之间的直接联系。我们认为，这种方法将是成功的，在其他类学习的概念，它将开发的团队合作和沟通技能，为学生毕业后的职业生涯必不可少的。

Educational activities directed at electronic materials processing are a new and growing component of the Colorado School of Mines undergraduate curriculum. This expansion is multidisciplinary in nature with at least four departments on campus heavily involved in the growth. It has also been strongly supported by the administration through the recruitment of new faculty with expertise in this area, the construction of new facilities, and the development of new curricula. Nevertheless, the program has a critical need for a laboratory class in electronic materials processing to provide students with hands-on experience with the steps involved in device fabrication. The goal of this proposal is to obtain key pieces of processing equipment needed to develop this lab course. A primary goal of the proposed course will be to give undergraduates a fundamental understanding of the processes leading to the production of semiconductor devices. Equally important will be the focus on developing teamwork and communication skills in an interdisciplinary environment. Lab activities will be performed by senior level students from four different departments. The lab projects will be designed to draw from the diverse talents of the various team members. Since the proposed experiments will be relatively simple, the students will be allowed to help design their own experiments and not just follow processing recipes. The communication of individual project results to their fellow classmates through both verbal and written mediums will be an important aspect of the course. Since device processing brings aspects of chemistry, physics, materials science, and engineering together in one very visible application, the course will provide an innovative medium for emphasizing the value of a multidisciplinary education. The class will also provide a direct connection between the classroom instruction students have received and the technology that impacts them daily. We feel that this approach will be successful in reinforci ng concepts learned in other classes, and that it will develop the teamwork and communication skills essential for the students' careers after graduation.