A Novel Manufacturing Process for Transparent Conducting Oxide Thin Films

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Transparent conducting oxide (TCO) materials possess the unusual ability to both transmit visible light and to conduct electricity. This basic electronic material finds widespread commercial use as transparent electrodes in flat panel displays and solar cell modules. Additional applications of this unique material include protective coatings, low-emissivity window glass, and gas detection sensors. This research project is to develop plasma-enhanced chemical vapor deposition (PECVD) as an alternative manufacturing approach for low temperature TCO synthesis. PECVD offers several potential advantages over current processing technologies. Foremost is the opportunity to reduce deposition temperatures to below 250C. Achievement of this goal will create opportunities for device fabrication on lightweight, flexible polymer substrates. In order to develop PECVD as a reliable manufacturing technology we plan to employ in-situ metrology coupled with nonlinear feedback control. Gas composition and film properties will be monitored in real time using optical emission spectroscopy and laser reflectometry, respectively. Control designs will be developed through nonlinear system identification and semi-global empirical modeling. A critical element of model development will rely on ex-situ evaluation of material properties. This interdisciplinary project involves two departments and is coordinated through the Colorado School of Mines' Center for Solar and Electronic Materials. This research is in close collaboration with industry.