A Novel Manufacturing Process for Transparent Conducting Oxide Thin Films

透明导电氧化物(TCO)材料具有传输可见光和导电的独特能力。这种基本的电子材料被广泛用作平板显示器和太阳能电池组件的透明电极。这种独特材料的其他应用包括保护涂层、低发射率窗户玻璃和气体检测传感器。本研究项目旨在开发等离子体增强化学气相沉积(PECVD)作为低温TCO合成的替代制造方法。与当前的处理技术相比，PECVD提供了几个潜在的优势。最重要的是有机会将沉积温度降低到250摄氏度以下。这一目标的实现将为在轻质、柔性的聚合物基板上制造器件创造机会。为了将PECVD发展成为一种可靠的制造技术，我们计划采用现场测量和非线性反馈控制相结合的方法。气体成分和薄膜特性将分别使用光学发射光谱和激光反射仪进行实时监测。控制设计将通过非线性系统辨识和半全局经验建模来进行。模型开发的一个关键要素将依赖于对材料特性的非现场评估。这个跨学科的项目涉及两个部门，并通过科罗拉多州矿业学院太阳能和电子材料中心进行协调。这项研究是与工业界密切合作的。

Transparent conducting oxide (TCO) materials possess the unusual ability to both transmit visible light and to conduct electricity. This basic electronic material finds widespread commercial use as transparent electrodes in flat panel displays and solar cell modules. Additional applications of this unique material include protective coatings, low-emissivity window glass, and gas detection sensors. This research project is to develop plasma-enhanced chemical vapor deposition (PECVD) as an alternative manufacturing approach for low temperature TCO synthesis. PECVD offers several potential advantages over current processing technologies. Foremost is the opportunity to reduce deposition temperatures to below 250C. Achievement of this goal will create opportunities for device fabrication on lightweight, flexible polymer substrates. In order to develop PECVD as a reliable manufacturing technology we plan to employ in-situ metrology coupled with nonlinear feedback control. Gas composition and film properties will be monitored in real time using optical emission spectroscopy and laser reflectometry, respectively. Control designs will be developed through nonlinear system identification and semi-global empirical modeling. A critical element of model development will rely on ex-situ evaluation of material properties. This interdisciplinary project involves two departments and is coordinated through the Colorado School of Mines' Center for Solar and Electronic Materials. This research is in close collaboration with industry.