Cutting Behavior and Process Monitoring During Grinding of Ceramics Using CVD-Tools

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Microsystems technology has found applications in a wide range of everyday live, from medicine to defence systems, from communication to sports and its importance has been continuously growing. The machining techniques have the advantage of being very flexible and able to produce structures in nearly all materials. This makes them very useful for small batches or single parts, as UV masks were the accuracy and production time requirements can be obtained with convention machining process. Nevertheless there are no systems allowing detecting the breaking of micro tools during the process. Due to the very small dimensions, specially the diameter of tools, and associated with its inherent fragility, it is even hard to detect a tool breakage. Thus a tool failure cannot be seen until the produced structure is checked with a confocal microscope. The aim of this proposal is to develop and integrate a tool failure detection system and an optical inspection in order to provide an in process monitoring system during the machining of micro parts. To do so acceleration sensors and a force measurement device are integrated in a micro machine. The relationship between the in process measurement system and tool failure will be investigated. Thus the limits guaranteeing a sufficient cutting behaviour will be set. To do so hard to cut piezo composite materials are going to be investigated due to its machinability by means of conventional tools and using diamond CVD-pencils and CVD-grinding wheels.