XYZ on a Chip: Compact and Integrated Chemical Sensors for Aqueous Analytes Based on Surface Modifaction of Semiconductors

XYZ 芯片：基于半导体表面改性的紧凑型集成化学传感器，用于水性分析物

• 批准号: 9980758
• 负责人: Thomas Kuech
• 金额: $ 52万
• 依托单位: University of Wisconsin-Madison
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-09-15 至 2003-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9980758&HistoricalAwards=false
• 关键词: XYZ; Chip; Compact; Integrated; Chemical

9980758EllisThe goal of this Engineering Microsystems: "XYZ" on a Chip project will develop chemical sensors and biosensors for nondestructive analyte detection in aqueous solution from micron-scale Ill-V semiconductor die chips that are commonly used in the construction of LEDs and photovoltaic cells. Preliminary experiments have demonstrated that both the photoluminescence (PL) and electroluminescence (EL) of these multi layer structures respond reversibly and robustly to amino acids in buffered aqueous solution. In Phase One of the project, die chips grown by metalorganic chemical vapor deposition (MOCVD) will be prepared with varying layer dimensions and chemical compositions in order to optimize EL and PL responses to a variety of aqueous test analytes, including amino acids, oligopeptides, and (metallo)porphyrins. Coatings will be applied to the surfaces of the die chips to enhance the selectivity of the response to certain anal ytes. In Phase Two, self-aligned structures will be prepared by chemically etching a trench of micron-scale width into the die chip. One side of this trench-divided structure can be placed in forward bias, yielding EL, and the other side of the structure can be placed in reverse bias to detect the EL as photocurrent. This creates a self-aligned integrated LED/Detector structure. Adsorption of aqueous analytes onto the uncoated or coated trench walls of these structures will be determined as a function of concentration and in the presence of various dissolved gases. Use of the structure for spectrophotometric analysis will be investigated. Numerical modeling of the electro-optical responses will guide the optimized construction of these integrated sensors. In Phase Three, a 5x5 array of the self-aligned LED/Detector structures will be prepared, and fluid flow of analyte solutions will be modeled. By using different coatings on the array elements, a multicomponent analysis of a mixture of analytes will be undertaken to demonstrate the versatility of the sensor structure. A variation of the sensor based on diode lasers will be investigated. Graduate and undergraduate students participating in this project will benefit from exposure to interdisciplinary research with sensor-driven applications that embrace chemistry and biochemistry, chemical engineering, and electrical engineering. A base of instructional materials derived from the materials and devices employed in this work will be expanded, and a website for the project developed.

9980758 Ellis该工程微系统公司的目标：“XYZ”芯片项目将开发化学传感器和生物传感器，用于从微米级III-V半导体芯片中无损检测水溶液中的分析物，这些芯片通常用于LED和光伏电池的构建。初步的实验表明，这些多层结构的光致发光（PL）和电致发光（EL）响应可逆的和鲁棒的缓冲水溶液中的氨基酸。在该项目的第一阶段，通过金属有机化学气相沉积（MOCVD）生长的芯片将制备不同的层尺寸和化学成分，以优化对各种水性测试分析物的EL和PL响应，包括氨基酸，寡肽和（金属）卟啉。涂层将被施加到芯片的表面，以增强对某些分析物的响应的选择性。在第二阶段，自对准结构将通过化学蚀刻微米级宽度的沟槽到芯片中来制备。该沟槽划分结构的一侧可以被置于正向偏置，产生EL，并且该结构的另一侧可以被置于反向偏置，以将EL检测为光电流。这产生了自对准的集成LED/检测器结构。在这些结构的未涂覆或涂覆的沟槽壁上的含水分析物的吸附将被确定为浓度的函数，并且在各种溶解气体的存在下。将研究该结构用于分光光度分析。光电响应的数值模拟将指导这些集成传感器的优化结构。在第三阶段中，将制备自对准LED/检测器结构的5x 5阵列，并且将对分析物溶液的流体流动进行建模。通过在阵列元件上使用不同的涂层，将对分析物的混合物进行多组分分析，以证明传感器结构的多功能性。将研究基于二极管激光器的传感器的变体。参与该项目的研究生和本科生将受益于跨学科研究，包括化学和生物化学，化学工程和电气工程的传感器驱动的应用。将扩大从这项工作中使用的材料和设备中获得的教学材料库，并为该项目开发一个网站。