New Chemical Pathways to the Growth of Complex Oxide Films for Nonlinear Photonics

该项目介绍了基于替代化学方法的化学气相沉积技术，用于生长LiNbO_3(LN)和相关材料。该方法涉及新的生长化学和新的反应器设计，以更好地理解氧化物生长的科学，从而形成高生长速率的沉积过程，这将产生新的氧化物异质结构。新的生长化学与新的反应堆设计相结合，以及使用基于超高真空的表面科学技术确定反应路径，有望引导合理的前体设计。随着使用化学束外延(CBE)对不断发展的生长化学的原位表征，成分和掺杂的新的基于氧化物的异质结构的生长，以及基于对这些氧化物材料的广泛表征和在类似器件的结构中的实现，生长-化学-性能关系的发展是被期待的。该项目是跨学科的，涉及化学和物理技能和方法，包括合成无机和有机金属化学、薄膜生长前体设计、外延薄膜生长和表征，以及详细的光学设备测量能力。*该项目致力于与电子和光子学具有很强技术相关性的基础材料研究。研究生和本科生将在一个跨学科的环境中工作，包括广泛的化学、化学工程、材料科学和设备物理观点。此外，该项目还努力吸纳代表人数不足的群体的学生。这项研究项目的成果将通过研究论文以及普通科学和教育期刊上的论文广泛传播。该项目介绍了基于替代化学方法的CVD技术，用于生长NbO_3锂(LiNbO_3，LN)和相关材料。该方法涉及新的生长化学物质，结合

This project addresses CVD techniques based on alternative chemistries for the growth of lithium niobate (LiNbO3, LN), and related materials. The approach involves new growth chemistries combined with new reactor designs to better understand the science of oxide growth leading to the formation of a high growth rate deposition process, which will yield new oxide heterostructures. New growth chemistries in combination with new reactor designs, and the determination of reaction pathways using UHV-based surface science techniques, are expected to lead ro rational precursor design. Along with in situ characterization of the evolving growth chemistry using chemical beam epitaxy (CBE), the growth of new oxide-based heterostructures in both composition and doping, and the development of growth-chemistry-property relationships based on extensive characterization and implementation of these oxide materials within device-like structures are anticipated. This project is interdisciplinary involving chemistry and physics skills and methodology that include synthetic inorganic and organometallic chemistry, film growth precursor design, epitaxial film growth and characterization, and detailed optical device measurement capabilities.***The project addresses fundamental materials research with strong technological relevance to electronics and photonics. Graduate and undergraduate students will be working within an interdisciplinary environment including broad chemical, chemical engineering, materials science, and device physics viewpoints. Additionally, the project strives for inclusion of students from underrepresented groups. The results of this research project will be broadly disseminated through research papers, and papers in general science and educational journals.This project addresses CVD techniques based on alternative chemistries for the growth of lithium niobate (LiNbO3, LN), and related materials. The approach involves new growth chemistries combined with