Acquisition/Development of Apparatus for Ultrathin or Interfacial Semiconductor Layer Growth and Student Training

该IMR奖是为了获得一种仪器，该仪器可以操纵表面化学，为超薄（~ 1到数十层单层）层的生长提供新方法。该仪器将是一个特高压系统，配备剂量剂、超音速喷嘴、原位探头和可变温度基板支架。研究范围既包括衬底与外延膜之间的电位过渡层，也包括两个外延膜之间的超薄层。该仪器为哥伦比亚大学提供了一项重要的新功能，并将允许首席研究员进行他的DMR项目DMR-99-03704的研究，“超薄薄膜（1- 20ml）生长的表面反应操纵”。该研究计划试图将我们对半导体表面化学细节和基础的理解的最新进展应用于开发超薄半导体和过渡层实际生长的新方法。所研究的材料化学将对传统的、基于分子的生长和根本的新生长方法产生影响。该仪器将采用超高真空探针，包括传统的和非标准的，以询问详细的表面化学，包括，例如，组成，键和表面配体的排序，前体分子和表面物质的反应途径。这是哥伦比亚大学的仪器购置奖。该仪器将用于超薄半导体层的超高真空生长的原位表面材料化学研究。该仪器有两个中心目标：1)化学形成超薄界面层的新方法的合作研究；2)表面和材料研究分析工具的研究生教育，以及实验技术的动手本科生培训。请注意，拟议的仪器由购买和制造的组件组成，因此是IMR计划的“获取”和“开发”用途的结合。该建议为该仪器的上线提供了一个有序的计划，并为该仪器的维护提供了一个经过测试的计划。该仪器申请包括哥伦比亚大学提供的35%的配套资金。

This IMR award is for acquisition of an instrument that manipulates surface chemistry for new approaches to the growth of ultra-thin (~ one to tens of monolayers) layers. The instrument will be an UHV system equipped with dosers, supersonic nozzles, in situ probes, and a variable temperature substrate holder. The scope of the research includes both potential transition layers between substrate and epitaxial films, and ultra-thin layers between two epitaxial films. The instrument provides an important new capabilities for the Columbia University and will allow the Principal Investigator to conduct research on his DMR program DMR-99-03704, "Manipulation of Surface Reactions For Growth of Ultra-thin Films (1-20 ML)." The research program attempts to apply recent advances in our understanding of detailed and fundamental semiconductor surface chemistry to the development of new approaches to the actual growth of ultrathin semiconductor and transition layers. The materials chemistry studied will have implications both for conventional, molecular-based growth, and for fundamentally new approaches to growth. The instrument will incorporate ultrahigh vacuum probes, both conventional and nonstandard, to interrogate the detailed surface chemistry, including, for example, the composition, bonding, and ordering of surface ligands and the reaction pathways of precursor molecules and surface species.This is an instrument acquisition award to Columbia University. The new instrument will be used to perform in situ surface materials chemistry studies for ultrahigh vacuum growth of ultra-thin semiconductor layers. The apparatus has two central goals: 1) collaborative research on new means for chemically forming ultra-thin interfacial layers and 2) graduate education on analytic tools for surface and materials study and for hands-on undergraduate training in experimental techniques. Note that the proposed instrument is composed of both purchased and fabricated components and is thus a combination of the "acquisition" and "development" uses of the IMR Program. The proposal provides an orderly plan for bringing this instrument on line and a tested plan for maintenance of this instrument. The instrument request includes 35% matching funds provided by Columbia University.