Acquisition/Development of Apparatus for Ultrathin or Interfacial Semiconductor Layer Growth and Student Training

这个IMR奖是为了奖励一种操纵表面化学的仪器，用于新的方法来生长超薄(~一个到几十个单分子层)层。该仪器将是一个特高压系统，配备了剂量计、超音速喷嘴、原位探头和变温衬底固定器。研究的范围既包括衬底和外延膜之间的潜在过渡层，也包括两层外延膜之间的超薄层。该仪器为哥伦比亚大学提供了一项重要的新功能，并将使首席研究员能够对其数字磁共振计划DMR-99-03704进行研究，该计划为超薄膜生长(1-20ML)控制表面反应。该研究计划试图将我们对详细和基本的半导体表面化学的理解的最新进展应用于开发实际生长超薄半导体和过渡层的新方法。所研究的材料化学将对传统的、基于分子的生长和根本上的新的生长方法产生影响。该仪器将包括常规和非标准的超高真空探头，以询问详细的表面化学，例如，表面配体的组成、键合和有序性以及前体分子和表面物种的反应路径。这是哥伦比亚大学的仪器获得奖。这台新仪器将用于超高真空生长超薄半导体层的原位表面材料化学研究。该仪器有两个中心目标：1)对化学形成超薄界面层的新方法进行合作研究；2)为表面和材料研究提供分析工具方面的研究生教育，并为本科生提供实验技术方面的实践培训。请注意，拟议的文书由购进的部件和制造的部件组成，因此是IMR方案的“采购”和“开发”用途的结合。该提案为使该仪器投入使用提供了一个有序的计划，并为该仪器的维护提供了一个经过测试的计划。该文书申请包括哥伦比亚大学提供的35%的配套资金。

This IMR award is for acquisition of an instrument that manipulates surface chemistry for new approaches to the growth of ultra-thin (~ one to tens of monolayers) layers. The instrument will be an UHV system equipped with dosers, supersonic nozzles, in situ probes, and a variable temperature substrate holder. The scope of the research includes both potential transition layers between substrate and epitaxial films, and ultra-thin layers between two epitaxial films. The instrument provides an important new capabilities for the Columbia University and will allow the Principal Investigator to conduct research on his DMR program DMR-99-03704, "Manipulation of Surface Reactions For Growth of Ultra-thin Films (1-20 ML)." The research program attempts to apply recent advances in our understanding of detailed and fundamental semiconductor surface chemistry to the development of new approaches to the actual growth of ultrathin semiconductor and transition layers. The materials chemistry studied will have implications both for conventional, molecular-based growth, and for fundamentally new approaches to growth. The instrument will incorporate ultrahigh vacuum probes, both conventional and nonstandard, to interrogate the detailed surface chemistry, including, for example, the composition, bonding, and ordering of surface ligands and the reaction pathways of precursor molecules and surface species.This is an instrument acquisition award to Columbia University. The new instrument will be used to perform in situ surface materials chemistry studies for ultrahigh vacuum growth of ultra-thin semiconductor layers. The apparatus has two central goals: 1) collaborative research on new means for chemically forming ultra-thin interfacial layers and 2) graduate education on analytic tools for surface and materials study and for hands-on undergraduate training in experimental techniques. Note that the proposed instrument is composed of both purchased and fabricated components and is thus a combination of the "acquisition" and "development" uses of the IMR Program. The proposal provides an orderly plan for bringing this instrument on line and a tested plan for maintenance of this instrument. The instrument request includes 35% matching funds provided by Columbia University.