Acquisition/Development of Apparatus for Ultrathin or Interfacial Semiconductor Layer Growth and Student Training

购置/开发超薄或界面半导体层生长设备和学生培训

• 批准号: 0076461
• 负责人: Richard Osgood
• 金额: $ 9.2万
• 依托单位: Columbia University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-08-01 至 2003-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0076461&HistoricalAwards=false
• 关键词: Acquisition; Development; Apparatus; Ultrathin; Interfacial

This IMR award is for acquisition of an instrument that manipulates surface chemistry for new approaches to the growth of ultra-thin (~ one to tens of monolayers) layers. The instrument will be an UHV system equipped with dosers, supersonic nozzles, in situ probes, and a variable temperature substrate holder. The scope of the research includes both potential transition layers between substrate and epitaxial films, and ultra-thin layers between two epitaxial films. The instrument provides an important new capabilities for the Columbia University and will allow the Principal Investigator to conduct research on his DMR program DMR-99-03704, "Manipulation of Surface Reactions For Growth of Ultra-thin Films (1-20 ML)." The research program attempts to apply recent advances in our understanding of detailed and fundamental semiconductor surface chemistry to the development of new approaches to the actual growth of ultrathin semiconductor and transition layers. The materials chemistry studied will have implications both for conventional, molecular-based growth, and for fundamentally new approaches to growth. The instrument will incorporate ultrahigh vacuum probes, both conventional and nonstandard, to interrogate the detailed surface chemistry, including, for example, the composition, bonding, and ordering of surface ligands and the reaction pathways of precursor molecules and surface species.This is an instrument acquisition award to Columbia University. The new instrument will be used to perform in situ surface materials chemistry studies for ultrahigh vacuum growth of ultra-thin semiconductor layers. The apparatus has two central goals: 1) collaborative research on new means for chemically forming ultra-thin interfacial layers and 2) graduate education on analytic tools for surface and materials study and for hands-on undergraduate training in experimental techniques. Note that the proposed instrument is composed of both purchased and fabricated components and is thus a combination of the "acquisition" and "development" uses of the IMR Program. The proposal provides an orderly plan for bringing this instrument on line and a tested plan for maintenance of this instrument. The instrument request includes 35% matching funds provided by Columbia University.

该IMR奖项是为了获得一种仪器，该仪器可以操纵表面化学，用于超薄（~一到几十个单层）层生长的新方法。该仪器将是一个UHV系统，配备有剂量器、超声喷嘴、原位探针和可变温度衬底保持器。研究的范围包括衬底和外延膜之间的潜在过渡层，以及两个外延膜之间的超薄层。该仪器为哥伦比亚大学提供了重要的新功能，并将允许首席研究员对其DMR计划DMR-99-03704“超薄膜（1-20 ML）生长的表面反应操纵”进行研究。“该研究计划试图将我们对详细和基本半导体表面化学的理解的最新进展应用于开发实际生长半导体和过渡层的新方法。 研究的材料化学将对传统的、基于分子的生长和从根本上讲的新的生长方法产生影响。 该仪器将包括常规和非标准的真空探针，以询问详细的表面化学，包括，例如，组成，键合和表面配体的排序以及前体分子和表面物种的反应途径。这是哥伦比亚大学的仪器采购奖。新仪器将用于进行超薄半导体层的真空生长的原位表面材料化学研究。 该仪器有两个中心目标：1）化学形成超薄界面层的新方法的合作研究和2）表面和材料研究的分析工具的研究生教育和实验技术的动手本科培训。 请注意，拟议的仪器由购买和制造的组件组成，因此是IMR计划的“采购”和“开发”用途的组合。 该建议提供了一个有序的计划，使该仪器上线和测试计划，该仪器的维护。仪器申请包括哥伦比亚大学提供的35%配套资金。