Equipment for a Chemistry and Physics Curriculum in Semiconductor Processing and Characterization

半导体加工和表征中化学和物理课程的设备

• 批准号: 0088630
• 负责人: David Johnson
• 金额: $ 7.46万
• 依托单位: University of Oregon Eugene
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-12-01 至 2002-11-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0088630&HistoricalAwards=false
• 关键词: Equipment; Chemistry; Physics; Curriculum; Semiconductor

Chemistry (12)In 1998, a pilot program in which chemistry and physics majors were exposed to semiconductor processing, integrated circuit fabrication, and device characterization was begun. The goal of the new curriculum was to prepare physics and chemistry majors for constructive participation in an industrial internship program, and ultimately for productive careers in the semiconductor manufacturing industry. The program clearly illustrated to the students the means by which basic chemistry and physics are essential to the preparation of integrated circuits. This pilot program was an overwhelming success, partly indicated by the fact that all student participants were offered permanent positions as process engineers by semiconductor companies located in Oregon. An essential component of this new program is the laboratory that is providing hands-on exposure to technologically important techniques not traditionally covered in undergraduate physics or chemistry curricula. The funds from the NSF-CCLI program are allowing the further development of this laboratory by the addition of a mask aligner, probe stations, and other measurement equipment. The project shares with the Division of Undergraduate Research the goal to prepare students for the technological workplace and to provide more effective linkages between higher education and industry.

化学（12）1998年，开始了一项试点计划，其中化学和物理专业的学生接触到半导体加工，集成电路制造和器件表征。新课程的目标是准备物理和化学专业的建设性参与工业实习计划，并最终在半导体制造业的生产性职业生涯。该计划清楚地向学生们说明了基础化学和物理对集成电路制备至关重要的手段。该试点项目取得了压倒性的成功，部分原因是所有学生参与者都获得了位于俄勒冈州的半导体公司提供的工艺工程师永久职位。这个新计划的一个重要组成部分是实验室，该实验室提供传统上未在本科物理或化学课程中涵盖的技术重要技术的实践。NSF-CCLI计划的资金允许通过增加掩模对准器，探针站和其他测量设备来进一步发展该实验室。该项目与本科生研究部的目标相同，即为学生进入技术工作场所做好准备，并在高等教育和工业之间建立更有效的联系。