RUI: Issues in Ultra Thin Film Growth on Group IV Semiconductors

RUI：IV 族半导体上的超薄膜生长问题

• 批准号: 0203097
• 负责人: James Craig
• 金额: $ 45.04万
• 依托单位: Bradley University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-06-01 至 2005-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0203097&HistoricalAwards=false
• 关键词: RUI; Issues; Ultra; Thin; Film

This RUI project is a collaborative study of two issues in growth of thin films on Group IV semi-conductor surfaces, i.e., on silicon and germanium. A team of four researchers at Bradley Univer-sity will address growth and characterization of ultra thin metallic films on silicon single crystal surfaces, and electron and photon assisted deposition of SiGe alloy films on Si(100) and Ge(100) surfaces under very low thermal budget conditions. Issues to be explored include electrical con-ductivity in ultra-thin metallic films on silicon as well as electromigration effects which may ac-company high current densities in such films. Also, fundamental issues of electron and photon driven processes in adsorbates which may serve as precursors to growth of SiGe alloy films will be studied. %%% The project addresses fundamental research issues in topical areas of materials science having technological relevance. Undergraduate students will play a primary role in the project, with op-portunities for research integrated directly into their academic program. The research program will provide access to state-of-the-art surface science equipment and unique opportunities for un-dergraduates to participate in and develop skills in exciting areas of materials science at the na-noscale level. An important feature of the project is the strong emphasis on education, and the integration of research and education. ***

该RUI项目是对IV族半导体表面上薄膜生长的两个问题的合作研究，即，在硅和锗上。布拉德利大学的一个由四名研究人员组成的团队将致力于在硅单晶表面上生长和表征超薄金属薄膜，以及在极低的热预算条件下在Si（100）和Ge（100）表面上电子和光子辅助沉积SiGe合金薄膜。待研究的问题包括硅基超薄金属薄膜的导电性以及这种薄膜中伴随高电流密度的电迁移效应。此外，电子和光子驱动过程中的吸附物，可能作为前体生长的SiGe合金薄膜的基本问题将进行研究。该项目解决了具有技术相关性的材料科学主题领域的基础研究问题。本科生将在该项目中发挥主要作用，研究机会直接融入他们的学术课程。该研究计划将提供最先进的表面科学设备，并为本科生提供独特的机会，让他们参与并发展材料科学领域的技能。该项目的一个重要特点是高度重视教育，并将研究与教育相结合。***