RUI: Issues in Ultra Thin Film Growth on Group IV Semiconductors(Renewal)

RUI：IV 族半导体上的超薄膜生长问题（续订）

• 批准号: 0511811
• 负责人: James Craig
• 金额: $ 40.42万
• 依托单位: Bradley University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-06-15 至 2009-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0511811&HistoricalAwards=false
• 关键词: RUI; Issues; Ultra; Thin; Film

TECHNICAL EXPLANATION This RUI project addresses fundamental materials science issues associated with adsorption and non-thermal electron and photon-driven dissociation of silyl- and ethyl-amines on Group IV semiconductor surfaces, and their potential as precursors for nitride film growth in a low thermal budget environment. Additionally, the project includes study of the self-assembly of metallic nanostructures that form during epitaxial growth of metallic atoms on various semiconductor surfaces to understand fundamental formation mechanisms. The collaborative project utilizes a wide array of deposition, surface spectroscopic and nanoscale imaging instrumentation to address these issues. The project aims for increased understanding of atomic scale processes governing the formation of ultra thin films and nanostructures on semiconductor surfaces. The increased understanding gained is expected to lead to the ability of the broader scientific and engineering communities to develop optimal ultra thin film and nanostructure fabrication techniques necessary for building faster and smaller electronic devices.NON-TECHNICAL EXPLANATIONThe project addresses fundamental materials research with strong technological relevance to electronics and photonics, and effectively integrates research and education at an undergraduate institution. Undergraduate education will be impacted in a significant and highly effective way through the integration of nanomaterials research into the undergraduate science and engineering education curriculum. The established undergraduate program in materials research and education at Bradley University will be enhanced through the associated research activities. The development of a research-rich environment has made a significant impact on the educational experience of many students. Also, the undergraduates' research experience will be positively influenced through exposure to off-campus researchers through collaborations with the USDA National Center for Agricultural Utilization Research in Peoria, and with two research groups at the University of Duisburg-Essen in Essen, Germany. An additional significant impact will be the establishment of unique collaborations between scientists in the Bradley Physics Department, who take a fundamental approach to nano-materials research, and engineers at Bradley and in industry, who take a practical, applied science approach.

技术说明本研究项目致力于解决与硅胺和乙胺在第四族半导体表面的吸附和非热电子和光子驱动的离解相关的基本材料科学问题，以及它们在低热预算环境下作为氮化物薄膜生长前体的潜力。此外，该项目还包括研究金属原子在各种半导体表面外延生长过程中形成的金属纳米结构的自组装，以了解基本的形成机制。该合作项目利用广泛的沉积、表面光谱和纳米级成像仪器来解决这些问题。该项目旨在增进对管理半导体表面上的超薄膜和纳米结构形成的原子尺度过程的了解。所获得的更多的了解有望使更广泛的科学和工程界有能力开发制造更快和更小的电子设备所需的最佳超薄膜和纳米结构制造技术。非技术解释该项目致力于与电子和光子学具有很强技术相关性的基础材料研究，并有效地整合了本科院校的研究和教育。通过将纳米材料研究整合到本科理工科教育课程中，本科教育将受到重大而高效的影响。布拉德利大学现有的材料研究和教育本科课程将通过相关的研究活动得到加强。丰富研究环境的发展对许多学生的教育体验产生了重大影响。此外，通过与美国农业部皮奥里亚国家农业利用研究中心和德国埃森杜伊斯堡大学的两个研究小组合作，本科生的研究经验将通过接触校外研究人员而受到积极影响。另外一个重大影响将是布拉德利物理系的科学家与布拉德利和工业界的工程师之间建立独特的合作关系，前者采用基本的纳米材料研究方法，后者采用实用的应用科学方法。