SBIR Phase I: Synchrotron Mimic for Lithography

这个小企业创新研究（SBIR）第一阶段项目将开发一个紧凑的光刻源。作为同步加速器的等效物，该建议提出了一个单步进，XUV或软X射线源，它提供了高亮度，高准直，适度的操作真空，优良的光谱和适中的成本。X射线在紧凑型电子感应加速器内产生，电子穿过由薄金属箔、晶体或多层制成的薄辐射器，产生向前定向的X射线束，其光子能量可以是XUV、软X射线和硬X射线，这取决于辐射器的选择。作为同步加速器模拟器，该源可以有许多应用。对于光刻，可以针对最高的光刻胶灵敏度优化x射线波长，例如1.4nm。在主要实验的证明中，已经观察到来自安装在电子感应加速器内的薄晶体和多层辐射器的可调谐单色X射线。通过相对于电子束方向摇动晶体或多层来获得和调谐脉冲高度谱。我们将利用现有的实验装置，展示在软X射线波长下的高X射线通量。潜在的商业应用努力将展示产生用于光刻和晶体学的XUV和X射线的能力。它还可以作为医学成像源和科学目的的实验室源，现在专门用于同步加速器。

This Small Business Innovation Research (SBIR) Phase I project will develop a compact source for lithography. As a synchrotron equivalent, this proposal presents a single-stepper, XUV or soft-x-ray source, which offers high brightness, high collimation, modest operating vacuum, excellent spectrum and moderate cost. The x-rays are generated inside a compact betatron by the electrons passing through thin radiators made of thin metal foils, crystals or multi-layers producing a forward-directed beam of x-rays whose photon energies can be XUV, soft and hard x-ray depending upon choice of radiator. As a synchrotron mimic, the source can have many applications. For lithography the x-ray wavelength can be optimized for highest photo-resist sensitivity, e.g.1.4 nm. In a proof of principal experiments, tunable monochromatic x-rays from thin crystal and multi-layer radiators mounted inside a betatron have been observed. Pulse-height spectra were obtained and tuned by rocking the crystal or multi-layer relative to the electron-beam direction. We will use our existing experimental apparatus to demonstrate high x-ray flux at soft x-ray wavelengths.Potential commercial applications effort will demonstrate the capability of generating XUV and x-rays for lithography and crystallography. It can also function also as a medical source for imaging and as a laboratory source for scientific purposes now relegated exclusively to synchrotrons.