A Collimated X-Ray Lithography Source Using a Kumakhov Lens

使用库马霍夫透镜的准直 X 射线光刻源

• 批准号: 9160568
• 负责人: Melvin Piestrup
• 金额: $ 5万
• 依托单位: Adelphi Technology, Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1992
• 资助国家: 美国
• 起止时间: 1992-01-15 至 1992-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9160568&HistoricalAwards=false
• 关键词: Collimated; Ray; Lithography; Source; Using

The purpose of this work is to design x-ray optics for the collection and redistribution of the annular x-ray cone generated by transition radiation such that a uniform x-ray spot is delivered at high power density to a mask/wafer target. This will increase the power density from the existing 1 mW/cm2 to 5 mW/cm2 permitting transition radiation to be a competitive source for x-ray lithography. Transition radiation is emitted in conical annulus which has a central hole in the radiation pattern and more than half of the x-rays are emitted at angles larger than the angle of peak intensity. Hence, efficient collection of the x-rays and their proper collimation into a uniform beam area on the size of the mask and wafer target areas are required for uniform exposure of x-ray photoresist of microintegrated circuit production. We will demonstrate feasibility of using Kumakhov x-ray optics to collect and collimate x-rays from a transition radiation source over a angular range of up to + 30 mrad and to provide a quasiparallel beam suitable of x-ray lithography. The desired intensity uniformity across the output x-ray beam is 3% . A complete design of a Kumakohov lens based on computer simulation and on experimental results with single capillaries and polycapillaries and their correlation with theoretical predictions will be done.

本工作的目的是设计X射线光学系统 用于收集和重新分配环形的 由过渡辐射产生的X射线锥 均匀的X射线点以高功率传送 密度到掩模/晶片目标。 这将增加 功率密度从现有的1 mW/cm 2提高到5 mW/cm 2 mW/cm 2，允许跃迁辐射为 X射线光刻的竞争源。 过渡 辐射在锥形环中发射， 辐射图案中的中心孔， 一半的X射线以大于 峰值强度的角度。 因此，高效 X射线的收集及其适当的准直 在掩模的大小上形成均匀的光束区域 并且晶片目标区域需要均匀 微集成X射线光刻胶曝光 电路生产。 我们将证明可行性 利用库马霍夫X射线光学系统收集 准直来自跃迁辐射源的X射线 在高达+30 mrad的角度范围内， 提供适合于X射线的准平行束 光刻。 所需的强度均匀性 输出X射线束为3%。 一个完整的设计 基于计算机模拟的Kumakohov透镜 以及单毛细管的实验结果 和多毛细血管及其与 将进行理论预测。