Micro-Ball Bearing Technology for Micro-Electro-Mechanical Systems (MEMS)

微机电系统（MEMS）还不够可靠和高效，不足以满足微系统的电气和机械功率需求。滚珠轴承机构有望通过减少摩擦和磨损来提高微型机械的长期可靠性和效率，并在避免制造复杂性的同时为运动部件提供坚固性和稳定性。因此，“微球轴承技术”有望对微发电机、微泵、微冷却器等微机械应用产生举足轻重的影响。我们的研究计划调查微球轴承技术在MEMS和微机械应用中的应用。为了实现这一目标，我们开发了一种基于mems的静电驱动微型电机，该电机集成了硅微机械轴承，其中不锈钢微球作为转子和定子之间的支撑机构。该微电机是基于一种新颖的方案，作为一个6相，底部驱动线性变电容微电机支承在微球轴承。拟议的研究活动侧重于(1)设计、建模和动态仿真，以实现设备的优化结构和几何形状；(2)技术开发，以提高传统加工方法的精密制造，同时最大限度地减少应力诱导过程，并仔细表征每个单元步骤；(3)长期可靠性研究，以调查(i)电气元件的运行；如受控环境下的电转子和定子，以及（ii）微球轴承的动态行为及其对设备性能的影响。该计划的教育目标是基于交互式学习环境，将研究目标纳入马里兰大学MEMS和微系统的本科和研究生课程。

Micro-Electro-Mechanical Systems (MEMS) are not yet reliable and efficient enough for electrical and mechanical power demands in Microsystems. Ball bearing mechanisms are expected to increase long-term reliability and efficiency in micro-machines through minimizing friction and wear, and to provide robustness and stability for moving parts while avoiding fabrication complexities. Therefore, "micro-ball bearing technology" is expected to have a pivotal impact on micro-machinery applications such as micro-generators, micro-pumps, and micro-coolers.Our research program investigates the use of micro-ball bearing technology for MEMS and micro-machinery applications. This goal is addressed by developing a MEMS-based electrostatically actuated micro-motor integrated with silicon micromachined bearings which house stainless-steel micro-balls as support mechanism between rotor and stator. The micro-motor is based on a novel scheme as a 6-phase, bottom-drive linear variable-capacitance micro-motor supported on micro-ball bearings. The proposed research activity focuses on (1) design, modeling, and dynamic simulation to realize an optimized structure and geometry for the device, (2) technology development to improve precision fabrication in conventional processing methods while minimizing stress-inducing processes and carefully characterizing each unit step, and (3) long-term reliability study to investigate (i) the operation of the electrical components, such as the electrical rotor and stator under controlled environment, and (ii) the dynamic behavior of the micro-ball bearings and their effect on the performance of the device. The educational objectives in this program are based on an interactive learning environment structured to incorporate research objectives into both undergraduate and graduate level courses in MEMS and Microsystems at the University of Maryland.