Sensors: A New Class of Devices Based on Interfacial Effects in Metal-Semiconductor Hybrid Structures

传感器：基于金属-半导体混合结构界面效应的新型器件

• 批准号: 0329347
• 负责人: Stuart Solin
• 金额: $ 45万
• 依托单位: Washington University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-09-01 至 2007-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0329347&HistoricalAwards=false
• 关键词: Sensors; New; Class; Devices; Based

1. Intellectual MeritWe have recently demonstrated experimentally that hybrid thin film structures possessingan appropriately selected geometric interface between a semiconductor and a metal display anew phenomenon that has been labeled extraordinary magnetoresistance (EMR) and that InSbdevices with either internal or external Au shunts exhibit room-temperature EMR as high as100% to 750,000% at magnetic fields, ranging from 0.05T to 4 Tesla, respectively. Thesenonmagnetic structures are readily fabricated for practical sensor applications such as read-headsfor ultra-high density magnetic recording and rival the performance of conventional sensorsbased on the giant magnetoresistance (GMR) effect. We have also demonstrated that EMRdevices are scalable from macroscopic to nanoscopic dimensions in the range of millimeters to20 nanometers. It has recently been realized that EMR is but one example of a broad class ofgeometry-driven interfacial effects in hybrid semiconductor-metal structures. Now a secondexample of such interfacial phenomena, extraordinary piezoconductivity (EPC), has also beendemonstrated by Solin et. al. Here we propose to establish proof of principle, elucidate theunderlying physics and develop prototypes of a new class of ifEXXly sensors in which thesensitivity of the metal-semiconductor interface to external perturbations gives rise to similarextraordinary responses. In the case of EMR we propose new prototype array structures forultra-high resolution magnetic sensing and magnetic imaging. For EPC we propose to clarify thephysical principles and to develop prototypes of ultra sensitive and robust strain and pressuresensors. For extraordinary electroconductance (EEC), extraordinary thermoconductance (ETC)and extraordinary optoconductance (EOC) devices we will first establish proof of principal andthereafter move to the prototype stage.All EXX effects are critically dependent on the geometry and physical properties themetal-semiconductor interface. We have already shown that the finite element method (FEM)for modeling EMR provides excellent ixno adjustable parameterl" agreement with experimentswhile revealing the current and potential distribution in the device in exquisite detail. Therefore,we propose collateral investigation of these novel EXX effects using FEM modeling since itincorporates geometrical issues, while accounting for the attendant complex boundaryconditions. FEM is also ideally suited for the design optimization of the structures in order toenhance sensitivity.2. Broader ImpactIt is anticipated that the proposed research will have broad beneficial impact oneducation, technology, and society. It will expose graduate and undergraduate students from anumber of disciplines/departments to new experimental techniques, basic physical principles,and novel fabrication methods related to EXX sensor development thus providinginterdisciplinary skills that will be mandatory for the next generation of the nation's scientistsand engineers. Research results will also be integrated into the undergraduate course work atboth institutions and into a special topics course for ioMagnetlo high school students. Theproposed research will enhance the opportunity for adding women and under-representedminorities to the Washington University faculty through hiring programs currently chaired by thePI. It will also significantly augment the development of a new campus-wide MaterialsInitiative/Center that is lead by the PI. EXX sensors could impact a variety of diversetechnologies including sensors for medical applications, manufacturing quality control,automobile safety, pollution-control and fuel-efficiency, thermal imaging devices and consumerelectronics with obvious social, medical and economic benefits.

1.我们最近已经通过实验证明，在半导体和金属之间具有适当选择的几何界面的混合薄膜结构显示出一种新的现象，这种现象被标记为异常磁阻（EMR），并且具有内部或外部Au分流的InSb器件在磁场下显示出高达100%至750，000%的室温EMR，范围分别为0.05T至4特斯拉。这种非磁性结构很容易制造用于实际的传感器应用，例如超高密度磁记录的读取头，并且可以与基于巨磁阻（GMR）效应的传统传感器的性能相媲美。我们还证明了EMR器件可以从宏观尺度扩展到纳米尺度，范围为毫米至20纳米。最近人们认识到，电磁辐射只是混合超导体-金属结构中的一大类几何驱动界面效应的一个例子。现在，这种界面现象的第二个例子，异常压电电导率（EPC），也被索林等人证明。在这里，我们建议建立原理证明，阐明潜在的物理和开发一类新的ifEXXly传感器的原型，其中金属-半导体界面对外部扰动的敏感性引起类似的超常规响应。在EMR的情况下，我们提出了新的原型阵列结构的超高分辨率磁传感和磁成像。对于EPC，我们建议澄清物理原理，并开发超灵敏和鲁棒的应变和压力传感器原型。对于异常电导（EEC）、异常热导（ETC）和异常光电导（EOC）器件，我们将首先建立原理证明，然后进入原型阶段。我们已经表明，有限元法（FEM）建模EMR提供了极好的非可调参数与实验的协议，同时揭示了在精致的细节器件中的电流和电位分布。因此，我们建议使用FEM建模对这些新的EXX效应进行附带调查，因为它包含了几何问题，同时考虑了随之而来的复杂边界条件。有限元法也非常适合结构的设计优化，以提高灵敏度。2.更广泛的影响预计拟议的研究将对教育，技术和社会产生广泛的有益影响。它将使来自多个学科/部门的研究生和本科生接触到新的实验技术、基本物理原理以及与EXX传感器开发相关的新颖制造方法，从而为下一代国家科学家和工程师提供强制性的跨学科技能。研究成果也将被整合到这两个机构的本科课程工作中，并为ioMagnetlo高中学生提供专题课程。拟议中的研究将通过目前由PI主持的招聘计划，增加妇女和代表性不足的少数民族进入华盛顿大学教师队伍的机会。它还将大大增加由PI领导的新的校园范围内的MaterialsInitiative/Center的发展。EXX传感器可以影响各种不同的技术，包括用于医疗应用的传感器，制造质量控制，汽车安全，污染控制和燃油效率，热成像设备和消费电子，具有明显的社会，医疗和经济效益。