Development of direct-write focussed electron beam processing techniques for nano-fabrication applications

开发用于纳米制造应用的直写聚焦电子束处理技术

• 批准号: DP0988861
• 负责人: Prof Matthew Phillips
• 金额: $ 15.24万
• 依托单位: University of Technology Sydney
• 依托单位国家: 澳大利亚
• 项目类别: Discovery Projects
• 财政年份: 2009
• 资助国家: 澳大利亚
• 起止时间: 2009-03-03 至 2013-12-31
• 项目状态: 已结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/DP0988861
• 关键词: Development; direct; write; focussed; electron

The burgeoning disciplines of nanotechnology and biotechnology have the potential to deliver breakthroughs in science and engineering that will revolutionise many aspects of everyday life. Progress in these emerging fields, however, requires parallel advances in the techniques used to fabricate, manipulate and characterise materials and devices at the nanoscale. This project will provide such enabling tools and fill a major gap in the research infrastructure urgently required by these exciting new technologies.

新兴的纳米技术和生物技术学科有可能在科学和工程领域取得突破，从而彻底改变日常生活的许多方面。然而，这些新兴领域的进展需要在纳米级制造、操作和组装材料和设备的技术方面取得平行进展。该项目将提供这些使能工具，并填补这些令人兴奋的新技术迫切需要的研究基础设施的主要空白。