Collaborative Research: Focused Electric Field Induced Ion Transport: A Patterning Process

合作研究：聚焦电场诱导离子传输：图案化过程

• 批准号: 0700045
• 负责人: Harley Johnson
• 金额: $ 14.28万
• 依托单位: University of Illinois at Urbana-Champaign
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-07-01 至 2010-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0700045&HistoricalAwards=false
• 关键词: Collaborative; Research; Focused; Electric; Field

The objective and approach of this Collaborative Research project is to use a novel non-contact pattern imprinting methodology to address the cost and environmental elements of manufacturing micron and possibly sub-micron scale surface features. The process is based on focused electric field induced ion transport, which is capable of imprinting miniaturized and micron size features at an attractive cost of ownership. The process employs an electrochemical cell, wherein the cathode has a cavity enclosing the electrolyte with a cation-selective ion-conducting flexible membrane. Preliminary results indicate several advantages of the proposed technique over the current technology. This project focuses on developing a mechanistic understanding of the fundamental process mechanisms. The gained insights will then be utilized to extend the process to the submicron regime. This process, if successful, would provide unique, environmentally benign process for micron- and sub-micron sized features and components. This process would respond to a rapidly increasing demand with significant manufacturing cost saving among very diverse industries, including electronic systems, actively controlled optics, automotive, communications and micro-satellites, medicine and biotechnology, micro-probes for air and land-based home security and counter terrorism systems. The project will provide exposures for graduate and undergraduate students to novel methods of designing and manipulating micron- & sub-micron scale material removal processes. The fundamentals of the processes will be incorporated into a new course curriculum in non-traditional approaches to micro and nano-patterning technology. Wide dissemination of the insights gained will be achieved by developing a software test bed for simulation and control of the process, and making it available through the World Wide Web.

这个合作研究项目的目标和方法是使用一种新的非接触式图案压印方法来解决制造微米和可能的亚微米尺度表面特征的成本和环境因素。该工艺基于聚焦电场诱导的离子传输，其能够以具有吸引力的拥有成本压印小型化和微米尺寸的特征。该方法采用电化学电池，其中阴极具有用阳离子选择性离子传导柔性膜封闭电解质的腔。初步结果表明，所提出的技术优于目前的技术的几个优点。这个项目的重点是发展的基本过程机制的机械理解。所获得的见解，然后将被用来扩展到亚微米政权的过程。该工艺如果成功，将为微米和亚微米尺寸的特征和部件提供独特的、环境友好的工艺。这一过程将满足迅速增长的需求，大大节省不同行业的制造成本，包括电子系统、主动控制光学、汽车、通信和微型卫星、医药和生物技术、用于空中和陆基家庭安全和反恐系统的微型探针。该项目将为研究生和本科生提供设计和操纵微米-亚微米尺度材料去除过程的新方法。这些过程的基本原理将被纳入一个新的课程，在非传统的方法，以微和纳米图案化技术。将通过开发一个模拟和控制过程的软件试验台，并通过万维网提供，广泛传播所获得的见解。