Collaborative Research: Focused Electric Field Induced Ion Transport: A Patterning Process

这个合作研究项目的目标和方法是使用一种新颖的非接触模式压印方法来解决制造微米和亚微米尺度表面特征的成本和环境因素。该工艺基于聚焦电场诱导离子传输，能够以具有吸引力的拥有成本印记小型化和微米尺寸的特征。该工艺采用电化学电池，其中阴极具有用阳离子选择性离子导电柔性膜包裹电解质的空腔。初步结果表明，与现有技术相比，所提出的技术有几个优点。这个项目的重点是发展对基本过程机制的机械理解。所获得的见解将被用于将该过程扩展到亚微米范围。这个过程，如果成功，将为微米和亚微米尺寸的特征和组件提供独特的，环保的过程。这一过程将响应快速增长的需求，并显著节省各种行业的制造成本，包括电子系统、主动控制光学、汽车、通信和微型卫星、医药和生物技术、用于空中和陆地家庭安全的微型探针以及反恐系统。该项目将为研究生和本科生提供设计和操作微米和亚微米尺度材料去除工艺的新方法。该过程的基本原理将被纳入一个新的课程课程在非传统的方法，以微和纳米图案技术。将通过开发模拟和控制这一过程的软件试验台，并通过万维网提供，广泛传播所获得的见解。

The objective and approach of this Collaborative Research project is to use a novel non-contact pattern imprinting methodology to address the cost and environmental elements of manufacturing micron and possibly sub-micron scale surface features. The process is based on focused electric field induced ion transport, which is capable of imprinting miniaturized and micron size features at an attractive cost of ownership. The process employs an electrochemical cell, wherein the cathode has a cavity enclosing the electrolyte with a cation-selective ion-conducting flexible membrane. Preliminary results indicate several advantages of the proposed technique over the current technology. This project focuses on developing a mechanistic understanding of the fundamental process mechanisms. The gained insights will then be utilized to extend the process to the submicron regime. This process, if successful, would provide unique, environmentally benign process for micron- and sub-micron sized features and components. This process would respond to a rapidly increasing demand with significant manufacturing cost saving among very diverse industries, including electronic systems, actively controlled optics, automotive, communications and micro-satellites, medicine and biotechnology, micro-probes for air and land-based home security and counter terrorism systems. The project will provide exposures for graduate and undergraduate students to novel methods of designing and manipulating micron- & sub-micron scale material removal processes. The fundamentals of the processes will be incorporated into a new course curriculum in non-traditional approaches to micro and nano-patterning technology. Wide dissemination of the insights gained will be achieved by developing a software test bed for simulation and control of the process, and making it available through the World Wide Web.