Acquisition of a plasma-enhanced-chemical-vapor-deposition cluster tool for photovoltaics and large area electronics

采购用于光伏和大面积电子产品的等离子体增强化学气相沉积集群工具

• 批准号: 0821675
• 负责人: Mahdi Farrokh Baroughi
• 金额: $ 25万
• 依托单位: South Dakota State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-09-01 至 2011-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0821675&HistoricalAwards=false
• 关键词: Acquisition; plasma; enhanced; chemical; vapor

Research Objectives and ApproachesThe objective of this proposal is to acquire an advanced plasma-enhanced chemical-vapor-deposition system for supporting research projects in the fields of photovoltaics at the South Dakota State University and State of South Dakota. The approach is to design the system based on the requirements of the proposed research projects and have it built and installed by the manufacturer.Intellectual MeritDue to the high cost of photovoltaic electricity and the importance of a clean and sustainable energy for the future of mankind, research on developing photovoltaic technologies with cost-reduction potential is of great importance. The PI is involved in initiating and conducting several research tracks in the field of cost-effective photovoltaics. These include 1) new generation of wafer based silicon solar cells, 2) high efficiency flexible thin film solar cells, 3) structural optimization of group-VI thin film alloys, and 4) organic/inorganic hybrid solar cells. The new instrument will support over 12 ongoing and proposed interdisciplinary research projects in the previously mentioned research fields.Broader ImpactsThis instrument will support the research and teaching activities at the three major research institutes in the State of South Dakota, the NSF-EPSCoR supported Photoactive Nanoscale Systems cluster, the new Ph.D. program in Photovoltaics at South Dakota State University, and projects from local industries. The PI will integrate and teach the synthesis and characterization of hydrogenated Si thin films in his graduate level courses. The system will be used to demonstrate thin film deposition for high school students during cleanroom tours.

研究目标和方法本提案的目的是获得一种先进的等离子体增强化学气相沉积系统，用于支持南达科他州州立大学和南达科他州的光伏领域的研究项目。这种方法是根据拟议研究项目的要求设计系统，并由制造商建造和安装。由于光伏电力的高成本以及清洁和可持续能源对人类未来的重要性，开发具有降低成本潜力的光伏技术的研究具有重要意义。国际光伏协会参与启动和开展了几个具有成本效益的光伏领域的研究。其中包括1)新一代硅片太阳能电池，2)高效柔性薄膜太阳能电池，3)VI族薄膜合金结构优化，4)有机/无机混合太阳能电池。新仪器将支持在上述研究领域正在进行的和拟议的12个跨学科研究项目。广泛影响该仪器将支持南达科他州三个主要研究机构的研究和教学活动，NSF-EPSCoR支持的光活性纳米系统集群，南达科他州立大学新的光伏博士项目，以及来自当地行业的项目。PI将在他的研究生课程中整合和教授氢化硅薄膜的合成和表征。该系统将用于在洁净室参观期间为高中生演示薄膜沉积。