Inverse-source and inverse-diffraction problems in photonics

光子学中的逆源和逆衍射问题

• 批准号: 190815195
• 负责人: Professor Dr. Wolfgang Osten
• 金额: --
• 依托单位: University of Joensuu (aufgelöst)
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2011
• 资助国家: 德国
• 起止时间: 2010-12-31 至 2013-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/190815195?language=en
• 关键词: Inverse; source; inverse; diffraction; problems

The proposed project concerns inverse scattering and inverse diffraction problems in photonics,i.e., problems of inferring the characteristics of either a light source (the inverse-sourceproblem) or scatterer (the inverse-diffraction problem) based on information provided by eitherthe measured properties of the scattered field or some a priori information. This type ofinverse scattering problems lie in the frontier area of diffractive optics, which have importantapplications such as the scatterometry for monitoring the critical dimensions of integratedcircuits. The proposed research will address challenges encountered in the development ofinverse-scattering theory and methodology in modern photonic applications. In particular, weconsider the inverse-diffraction problem of subwavelength surface-relief gratings and diffractiveoptical elements as well as the inverse-source problem of a wide class of partially coherentsources such as LEDs and Excimer lasers. Solutions to these inverse problems are essentiale.g. for non-invasive measurement of scattering surfaces and accurate modeling of partiallycoherent light combined with micro- and nano-optics. For solving both types of inverse problems,high-precision metrology systems are needed to perform accurate measurement of variousdiffraction quantities such as intensity, polarization, and coherence of light.

拟议的项目涉及光子学中的逆散射和逆衍射问题，即，根据散射场的测量特性或一些先验信息来推断光源（反源问题）或散射体（反衍射问题）的特性的问题。这类逆散射问题属于衍射光学的前沿领域，在集成电路关键尺寸的检测中有着重要的应用，如散射测量。这项研究将解决现代光子学应用中逆散射理论和方法发展中遇到的挑战。特别地，我们考虑了亚波长表面浮雕光栅和衍射光学元件的逆衍射问题，以及广泛的部分相干光源，如LED和准分子激光器的逆源问题。这些反问题的解决方案是必不可少的。用于散射表面的非侵入式测量和结合微米和纳米光学的部分相干光的精确建模。为了解决这两种类型的反问题，需要高精度的计量系统来执行各种衍射量的精确测量，如强度，偏振和相干光。