Characterization of nanostructures with large parameter spaces by fast white light Mueller matrix scatterometry
通过快速白光穆勒矩阵散射测量法表征大参数空间纳米结构
基本信息
- 批准号:367363335
- 负责人:
- 金额:--
- 依托单位:
- 依托单位国家:德国
- 项目类别:Research Grants
- 财政年份:2017
- 资助国家:德国
- 起止时间:2016-12-31 至 2020-12-31
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
Model-based scatterometry is the state-of-the-art optical inspection method for lithographically processed nanostructures. However, the quantitative characterization of structures with large parameter spaces often fails due to insufficient sensitivities and high cross-correlations. In order to improve the reconstruction process, it is essential to measure and evaluate as many information channels of the light field as possible, thus increasing the number of uncorrelated data sets. Against this background, the main objective of the proposal consists of combining conventional Fourier scatterometry with Mueller matrix polarimetry and white light interferometry, which makes relevant information channels simultaneously accessible. The significantly increased information content enables the fast and highly precise characterization of (sub-wavelength) grating structures with large parameter spaces. The proposed evaluation strategy includes the spatially-resolved reconstruction of the complex indices of refraction, which is particularly important since the frequently used assumption of constant values typically causes large errors. Furthermore, geometrical grating parameters with small scattering volumes, such as sidewall angles or line edge roughness, are to be characterized. All in all, the proposal aims at a demonstration of significantly reduced measurement uncertainties (not exceeding 1% of the nominal value) and an improved discriminability of similar structure types.
基于模型的散射法是光刻加工纳米结构最先进的光学检测方法。然而,对于具有大参数空间的结构,由于灵敏度不足和高度的互相关性,其定量表征常常失败。为了改进重建过程,有必要测量和评估尽可能多的光场信息通道,从而增加不相关数据集的数量。在此背景下,该方案的主要目标是将传统的傅里叶散射法与米勒矩阵偏振法和白光干涉法相结合,使相关的信息通道同时可用。显著增加的信息量使得能够快速和高精度地表征具有大参数空间的(亚波长)光栅结构。拟议的评估策略包括复杂折射率的空间分辨重建,这一点特别重要,因为经常使用的常数值假设通常会导致很大的误差。此外,还需要表征具有较小散射体积的几何光栅参数,例如侧壁角度或线边缘粗糙度。总而言之,该提案旨在证明显著减少了测量不确定度(不超过标称值的1%),并提高了对类似结构类型的辨别能力。
项目成果
期刊论文数量(2)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
Optical sensor design for fast and process-robust position measurements on small diffraction gratings
- DOI:10.1016/j.optlaseng.2020.106267
- 发表时间:2020-11-01
- 期刊:
- 影响因子:4.6
- 作者:Godecke, Maria Laura;Bett, Claudia Monika;Osten, Wolfgang
- 通讯作者:Osten, Wolfgang
White-light Mueller-matrix Fourier scatterometry for the characterization of nanostructures with large parameter spaces
用于表征大参数空间纳米结构的白光穆勒矩阵傅立叶散射测量
- DOI:10.1117/12.2551276
- 发表时间:2020
- 期刊:
- 影响因子:0
- 作者:M. L. Gödecke;K. Frenner;W. Osten
- 通讯作者:W. Osten
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Professor Dr. Wolfgang Osten其他文献
Professor Dr. Wolfgang Osten的其他文献
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{{ truncateString('Professor Dr. Wolfgang Osten', 18)}}的其他基金
High resolution microscopy using a scattering layer
使用散射层的高分辨率显微镜
- 批准号:
326167230 - 财政年份:2017
- 资助金额:
-- - 项目类别:
Research Grants
Rigorous simulation of speckle fields caused by large area rough surfaces using fast algorithms based on higher order boundary element methods
使用基于高阶边界元方法的快速算法对大面积粗糙表面引起的散斑场进行严格模拟
- 批准号:
375876714 - 财政年份:2017
- 资助金额:
-- - 项目类别:
Research Grants
A self-calibrating interferometric method for asphere and freeform testing
用于非球面和自由曲面测试的自校准干涉测量方法
- 批准号:
273678658 - 财政年份:2015
- 资助金额:
-- - 项目类别:
Research Grants
High-resolution single-shot measurement of semi-transparent films by Chromatic Confocal Coherence Tomography (CCCT)
通过彩色共焦相干断层扫描 (CCCT) 对半透明薄膜进行高分辨率单次测量
- 批准号:
282505242 - 财政年份:2015
- 资助金额:
-- - 项目类别:
Research Grants
Nanopositioning, -measuring and -patterning on extended surfaces and volumes for characterization, design and fabrication of advanced optical components and systems.
在扩展表面和体积上进行纳米定位、测量和图案化,用于先进光学元件和系统的表征、设计和制造。
- 批准号:
267094782 - 财政年份:2015
- 资助金额:
-- - 项目类别:
Major Instrumentation Initiatives
Design, fabrication and test of a cascaded plamonic superlens
级联等离子体超透镜的设计、制造和测试
- 批准号:
234120627 - 财政年份:2013
- 资助金额:
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Research Grants
Dynamical referencing of coordinate measurement machines and machine tools
坐标测量机和机床的动态参考
- 批准号:
243209925 - 财政年份:2013
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-- - 项目类别:
Research Grants
Remote Laboratory for Optical Micro Metrology
光学显微计量远程实验室
- 批准号:
223883488 - 财政年份:2012
- 资助金额:
-- - 项目类别:
Research Grants
Label-free high resolution 3D microscopy using opposed-view dark-field digital holography
使用对视暗场数字全息术的无标记高分辨率 3D 显微镜
- 批准号:
197047634 - 财政年份:2011
- 资助金额:
-- - 项目类别:
Research Grants
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