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Characterization of nanostructures with large parameter spaces by fast white light Mueller matrix scatterometry

通过快速白光穆勒矩阵散射测量法表征大参数空间纳米结构

基本信息

批准号：
367363335
负责人：
Professor Dr. Wolfgang Osten
金额：
--
依托单位：
Institut für Technische Optik (ITO)
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2017
资助国家：
德国
起止时间：
2016-12-31 至 2020-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/367363335?language=en
关键词：
Characterization nanostructures large parameter spaces

项目摘要

Model-based scatterometry is the state-of-the-art optical inspection method for lithographically processed nanostructures. However, the quantitative characterization of structures with large parameter spaces often fails due to insufficient sensitivities and high cross-correlations. In order to improve the reconstruction process, it is essential to measure and evaluate as many information channels of the light field as possible, thus increasing the number of uncorrelated data sets. Against this background, the main objective of the proposal consists of combining conventional Fourier scatterometry with Mueller matrix polarimetry and white light interferometry, which makes relevant information channels simultaneously accessible. The significantly increased information content enables the fast and highly precise characterization of (sub-wavelength) grating structures with large parameter spaces. The proposed evaluation strategy includes the spatially-resolved reconstruction of the complex indices of refraction, which is particularly important since the frequently used assumption of constant values typically causes large errors. Furthermore, geometrical grating parameters with small scattering volumes, such as sidewall angles or line edge roughness, are to be characterized. All in all, the proposal aims at a demonstration of significantly reduced measurement uncertainties (not exceeding 1% of the nominal value) and an improved discriminability of similar structure types.

基于模型的散射法是光刻加工纳米结构最先进的光学检测方法。然而，对于具有大参数空间的结构，由于灵敏度不足和高度的互相关性，其定量表征常常失败。为了改进重建过程，有必要测量和评估尽可能多的光场信息通道，从而增加不相关数据集的数量。在此背景下，该方案的主要目标是将传统的傅里叶散射法与米勒矩阵偏振法和白光干涉法相结合，使相关的信息通道同时可用。显著增加的信息量使得能够快速和高精度地表征具有大参数空间的(亚波长)光栅结构。拟议的评估策略包括复杂折射率的空间分辨重建，这一点特别重要，因为经常使用的常数值假设通常会导致很大的误差。此外，还需要表征具有较小散射体积的几何光栅参数，例如侧壁角度或线边缘粗糙度。总而言之，该提案旨在证明显著减少了测量不确定度(不超过标称值的1%)，并提高了对类似结构类型的辨别能力。