Nanopositioning, -measuring and -patterning on extended surfaces and volumes for characterization, design and fabrication of advanced optical components and systems.

纳米定位和测量机（NPMM）能够在扩展表面上以纳米精度定位，测量，探测和操纵物体。高分辨率和快速检测局部特性，如缺陷、故障或设计偏差，可以适应于扩展的光学元件和系统，使用多尺度测量策略和传感器融合比使用单个传感器探测更灵活。传感器融合将高精度绝对形状测量与纳米尺度上的附加信息结合在一起，这些信息低于光学系统的分辨率限制，例如使用等离子体近场传感器和光学超材料。在这种多传感器系统中选择合适的传感器并确定其参数将由辅助系统自动执行。在高精度制造的最后精加工步骤中，光学表面的误差降低到10纳米（rms）或以下，关键是绝对测量。通过将光学全场方法与NPMM200测量相结合，可以提高光学功能表面（如球面、自由曲面、do和杂化元件）的高精度表征。为了显示量子相关性，金刚石或SiC等固体中的原子杂质必须以优于10纳米的空间精度定位。在不同长度尺度上处理的额外控制和通信结构必须与量子电路和量子处理器相结合。这些控制结构由超导环组成，它们的位置是使用NPMM-200确定的。这种昂贵而独特的设备的集成将在ITO远程实验室概念中实现。基于这样的概念，并参考一个系统的访问过程，NPMM可以被远程用户应用。实现一个虚拟的纳米加工和纳米测量中心是这些研究的目标。

Nanopositioning and measuring machines (NPMM) enable positioning, measuring, probing and manipulating of objects with nanometer precision on extended surfaces. High resolution and fast detection of local properties like imperfections, faults or deviations from design can be adapted to extended optical components and systems much more flexible with a multi-scale measurement strategy and sensor fusion than probing with individual sensors. Sensor fusion combines high precision absolute shape measurement with additional information on the nanoscopic scale below the resolution limit of optical systems using e.g. plasmonic near-field sensors and optical metamaterials. Selection of suitable sensors in such a multisensor system and determination of their parameters will be performed automatically by an assistance system. Key element in the final finishing step of high precision fabrication, where the error of the optical surface is reduced to the 10 nm level (rms) or below, is the absolute measurement. Such a high precision characterization of optical functional surfaces like e.g. aspheres, free forms, DOEs and hybride elements can be improved by combining optical full field methods with NPMM200 measurements. Atomic impurities in solids like Diamond or SiC must be positioned with a spatial accuracy of better than 10 nm in order to show quantum correlations. Additional control and communication structures processed on different length scales have to be combined to quantum circuits and quantum processors. These control structures consist of superconducting rings, their position is determined using the NPMM-200. Integration of such an expensive and unique device will be realized at ITO within a remote laboratory concept. Based on such a concept and referring to a systematic access procedure, the NPMM could be applied by remote users. The implementation of a virtual nano-processing and nano-measurement center is objective of these investigations.