Nanopositioning, -measuring and -patterning on extended surfaces and volumes for characterization, design and fabrication of advanced optical components and systems.

点击翻译按钮获取中文摘要

Nanopositioning and measuring machines (NPMM) enable positioning, measuring, probing and manipulating of objects with nanometer precision on extended surfaces. High resolution and fast detection of local properties like imperfections, faults or deviations from design can be adapted to extended optical components and systems much more flexible with a multi-scale measurement strategy and sensor fusion than probing with individual sensors. Sensor fusion combines high precision absolute shape measurement with additional information on the nanoscopic scale below the resolution limit of optical systems using e.g. plasmonic near-field sensors and optical metamaterials. Selection of suitable sensors in such a multisensor system and determination of their parameters will be performed automatically by an assistance system. Key element in the final finishing step of high precision fabrication, where the error of the optical surface is reduced to the 10 nm level (rms) or below, is the absolute measurement. Such a high precision characterization of optical functional surfaces like e.g. aspheres, free forms, DOEs and hybride elements can be improved by combining optical full field methods with NPMM200 measurements. Atomic impurities in solids like Diamond or SiC must be positioned with a spatial accuracy of better than 10 nm in order to show quantum correlations. Additional control and communication structures processed on different length scales have to be combined to quantum circuits and quantum processors. These control structures consist of superconducting rings, their position is determined using the NPMM-200. Integration of such an expensive and unique device will be realized at ITO within a remote laboratory concept. Based on such a concept and referring to a systematic access procedure, the NPMM could be applied by remote users. The implementation of a virtual nano-processing and nano-measurement center is objective of these investigations.