MRI-R2: Acquisition of a Direct Write Electron Beam Lithography System for Exploring Mesoscale Science, Materials, and Devices

该奖项是根据2009年美国复苏和再投资法案（公法111-5）资助的。目的：在几十个原子上控制和操纵物质的能力使研究人员能够研究量子力学占主导地位的原子尺度和体尺度之间的制度。这种能力的可用性对于在这些尺度上制造设备或研究物理效应的学术和工业研究人员的成功至关重要。该项目通过获得高分辨率电子束光刻系统来解决这一需求。智力优势：明尼苏达大学在磁学、中尺度超导、纳米电子学、纳米机电系统、量子点器件、纳米尺度成像、表面增强拉曼和其他领域进行前沿研究。所有这些工作都非常依赖于书写极其精细线条的能力。该提案为明尼苏达纳米制造中心（NFC）采购100 keV场发射电子束光刻系统寻求资金。NFC通过来自全国各地的创新项目为庞大且不断增长的用户群提供支持，并证明了其为用户群操作和维护复杂系统的能力。更广泛的影响：明尼苏达州是NSF的关键节点？美国国家纳米基础设施网络去年拥有超过600个用户。加强这些研究人员的研究生教育将产生重大影响。NFC也是Nano-Link的中心枢纽，Nano-Link是纳米技术AAS教育的区域中心。提议的工具将被用作纳米链接努力的一部分，以展示尖端的模式定义和量子效应，可以很容易地被技术教育专业人员理解。

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5). Objective: The ability to control and manipulate matter at a few tens of atoms allows researchers to investigate a regime between the atomic-scale where quantum mechanics dominate and the bulk-scale. The availability of this capability is critical to the success of both academic and industrial researchers who are making devices or studying physical effects at these scales. This project addresses this need through the acquisition of a high resolution electron-beam lithography system. Intellectual Merit: The University of Minnesota is conducting leading edge research in magnetics, mesoscale superconductivity, nanoelectronics, nano electromechanical systems, quantum dot devices, nano scale imaging, surface enhanced Raman, and other areas. All of this work is critically dependent on the ability to write extremely fine lines. This proposal seeks funding for the acquisition of a 100 keV field-emission electron-beam lithography system for the Minnesota Nano Fabrication Center (NFC). NFC supports a large and growing group of users with innovative projects from across the nation and has proven its ability to operate and maintain complex systems for its user base.Broader Impacts: Minnesota is a key node in NSF?s National Nano Infrastructure Network with more than 600 users last year. Enhancing graduate education of these researchers will be a major impact. NFC is also a central hub for Nano-Link, a regional center for nanotechnology AAS education. The proposed tool will be used as part of the Nano-Link effort to demonstrate cutting edge pattern definition and quantum effects that can be readily understood by technical education professionals.