Six-Axis Visual Sensing and Visual Servo Control Rendering Direct Metrology for Manipulation of Multiple Micro Objects

六轴视觉传感和视觉伺服控制渲染用于操纵多个微型物体的直接计量

• 批准号: 1067962
• 负责人: Chia-Hsiang Menq
• 金额: $ 46.72万
• 依托单位: Ohio State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-07-01 至 2015-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1067962&HistoricalAwards=false
• 关键词: Six; Axis; Visual; Sensing; Servo

The objective of this award is to characterize the formation of interference fringes imposed on an object surface under an interferometer-equipped optical microscope and to derive an analytical three degree-of-freedom fringe image model for out-of-plane motion estimation and a warped shadow projection model for in-plane motion estimation. The proposed approach consists of three activities. First, a continuously shifting image model is proposed to achieve unbiased real-time image registration. Its application to pattern matching of warped images employed in six-axis visual sensing will be investigated to enable ultra-precise motion tracking. Second, a single software module that realizes six-axis visual sensing will be implemented to support multiple changeable vision sensors, including various objective lenses and cameras. Together with an interferometer-equipped optical microscope, they form a six-axis visual sensing system. Third, the visual sensing system will then be employed to achieve six-axis visual servo control that renders direct metrology for manipulation of multiple micro objects. Since the visual sensor's coordinate system coincides with the object space, the proposed visual servo control eliminates the effect of kinematic errors and continuously compensates for time varying uncertainties induced by interacting forces and/or thermal drifts. If successful, technological innovations created from this award will open up important new research applications in manufacturing. The six-axis visual sensing system can serve as a feedback sensor to control the motion of various motion control stages, measurement probes, and manipulators for a wide spectrum of applications, including automatic alignment, tool-sample engagement, dynamic tracking, and controlled manipulation. It could be readily reconfigured to perform a breadth of functions for a variety of applications involving components that range in size from a few millimeters down to several micrometers. It represents a transformational change in how visual sensing and visual servo control can be used in ultra-precise metrology and manipulation.

该奖项的目的是表征干涉仪装备的光学显微镜下施加在物体表面上的干涉条纹的形成，并推导出一个分析的三自由度条纹图像模型，用于平面外运动估计和一个扭曲的阴影投影模型，用于平面内运动估计。拟议的办法包括三项活动。首先，提出了一种连续平移的图像模型来实现无偏的实时图像配准。它的应用模式匹配的翘曲图像在六轴视觉传感将进行研究，使超精确的运动跟踪。第二，实现六轴视觉传感的单一软件模块将支持多种可变视觉传感器，包括各种物镜和摄像头。与配备干涉仪的光学显微镜一起，它们形成了六轴视觉传感系统。第三，视觉传感系统，然后将被用来实现六轴视觉伺服控制，使直接计量多个微对象的操作。由于视觉传感器的坐标系与对象空间相一致，所提出的视觉伺服控制消除了运动误差的影响，并不断补偿由相互作用力和/或热漂移引起的时变不确定性。 如果成功，该奖项所创造的技术创新将在制造业中开辟重要的新研究应用。六轴视觉传感系统可以作为反馈传感器来控制各种运动控制台、测量探头和操纵器的运动，用于广泛的应用，包括自动对准、工具-样品接合、动态跟踪和受控操纵。它可以很容易地进行重新配置，以执行各种应用程序的功能，涉及组件的尺寸范围从几毫米到几微米。它代表了视觉传感和视觉伺服控制如何用于超精密计量和操作的变革。