Modeling and Control of Magnetically Actuated Compliant Micromanipulators Enabling Multi-axis Scanning of 3D Micro/Nano Objects

该奖项的目的是研究磁驱动柔性微机械臂的静态和动态特性，实现创新设计和先进控制，使三维微米/纳米物体的多轴扫描成为可能。拟议的办法包括三个阶段。首先，建立柔顺机械手的静态和动态模型，并对多轴磁致动进行分析。目的是实现多轴探测系统的合理设计和表征。其次，将开发先进的控制方案，以实现三维物体的多轴扫描。该多轴扫描方案既可在接触模式下工作，也可在轻敲模式下工作。第三，实现两轴扫描探针显微系统。与其他尝试实现更大程度地访问三维样品相比，这些尝试使用专门的探针，并且需要对样品的姿态和标称几何形状的先验知识，两轴扫描探针显微系统可以用于扫描具有未知几何形状的三维物体。一旦成功完成，由该奖项创造的技术创新将在制造业中开辟重要的新研究应用。与传统扫描探针显微镜是二维平面工具相比，两轴扫描探针显微镜系统是三维表面工具。它代表了扫描探针显微镜如何在超精密制造中使用的转型变化。

The objective of this award is to investigate the static and dynamic characteristics of magnetically actuated compliant micromanipulators and to realize innovative design and advanced control, enabling multi-axis scanning of three-dimensional micrometer/nanometer objects. The proposed approaches consist of three phases. First, static and dynamic models of the compliant manipulator will be developed and multi-axis magnetic actuation will be analyzed. The aim is to enable rational design and characterization of multi-axis probing systems. Second, advanced control schemes will be developed to enable multi-axis scanning of three-dimensional objects. The multi-axis scanning scheme can operate at contact mode as well as tapping mode. Third, a two-axis scanning probe microscopic system will be realized. Compared to other attempts to achieve greater access to three-dimensional samples, which use specialized probes and require a priori knowledge of the pose and nominal geometry of the sample, the two-axis scanning probe microscopic system can be employed to scan three-dimensional objects with unknown geometry. Upon successful completion, technological innovations created from this award will open up important new research applications in manufacturing. Compared to conventional scanning probe microscopes, which are two-dimensional planar tools, the two-axis scanning probe microscopic system is a three-dimensional surface tool. It represents a transformational change in how scanning probe microscopy can be used in ultra precision manufacturing.