Modeling and Control of Magnetically Actuated Compliant Micromanipulators Enabling Multi-axis Scanning of 3D Micro/Nano Objects

磁驱动柔性微操纵器的建模和控制，实现 3D 微/纳米物体的多轴扫描

• 批准号: 0928118
• 负责人: Chia-Hsiang Menq
• 金额: $ 39.97万
• 依托单位: Ohio State University Research Foundation -DO NOT USE
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-10-01 至 2012-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0928118&HistoricalAwards=false
• 关键词: Modeling; Control; Magnetically; Actuated; Compliant

The objective of this award is to investigate the static and dynamic characteristics of magnetically actuated compliant micromanipulators and to realize innovative design and advanced control, enabling multi-axis scanning of three-dimensional micrometer/nanometer objects. The proposed approaches consist of three phases. First, static and dynamic models of the compliant manipulator will be developed and multi-axis magnetic actuation will be analyzed. The aim is to enable rational design and characterization of multi-axis probing systems. Second, advanced control schemes will be developed to enable multi-axis scanning of three-dimensional objects. The multi-axis scanning scheme can operate at contact mode as well as tapping mode. Third, a two-axis scanning probe microscopic system will be realized. Compared to other attempts to achieve greater access to three-dimensional samples, which use specialized probes and require a priori knowledge of the pose and nominal geometry of the sample, the two-axis scanning probe microscopic system can be employed to scan three-dimensional objects with unknown geometry. Upon successful completion, technological innovations created from this award will open up important new research applications in manufacturing. Compared to conventional scanning probe microscopes, which are two-dimensional planar tools, the two-axis scanning probe microscopic system is a three-dimensional surface tool. It represents a transformational change in how scanning probe microscopy can be used in ultra precision manufacturing.

该奖项的目的是研究磁致动柔顺微操作器的静态和动态特性，并实现创新设计和先进控制，使三维微米/纳米物体的多轴扫描成为可能。拟议的办法包括三个阶段。首先，将开发的静态和动态模型的柔顺机械手和多轴磁驱动将进行分析。其目的是实现多轴探测系统的合理设计和表征。其次，将开发先进的控制方案，以实现三维物体的多轴扫描。多轴扫描方案可以在接触模式以及轻敲模式下操作。第三，将实现双轴扫描探针显微系统。与使用专用探针并需要样品的姿态和标称几何形状的先验知识来实现对三维样品的更大访问的其他尝试相比，双轴扫描探针显微系统可以用于扫描具有未知几何形状的三维物体。成功完成后，该奖项创造的技术创新将在制造业中开辟重要的新研究应用。与二维平面工具的传统扫描探针显微镜相比，双轴扫描探针显微镜系统是三维表面工具。它代表了扫描探针显微镜如何用于超精密制造的转型变化。