Modeling and Control of Magnetically Actuated Compliant Micromanipulators Enabling Multi-axis Scanning of 3D Micro/Nano Objects

该奖项的目的是研究磁力驱动柔顺微操作器的静态和动态特性，实现创新设计和先进控制，实现对三维微米/纳米物体的多轴扫描。拟议的方法包括三个阶段。首先，建立了柔性机械臂的静态和动态模型，分析了多轴磁致伸缩。其目的是使多轴探测系统的合理设计和表征成为可能。第二，将开发先进的控制方案，使三维物体能够进行多轴扫描。多轴扫描方案可以在接触模式和敲击模式下操作。第三，将实现两轴扫描探头显微系统。与使用专门的探头并需要样品的姿势和标称几何形状的先验知识来实现更大程度地获取三维样品的其他尝试相比，两轴扫描探头显微系统可以用于扫描具有未知几何形状的三维物体。在成功完成后，由该奖项创造的技术创新将在制造业中开辟重要的新研究应用。与传统的扫描探针显微镜是二维平面工具相比，两轴扫描探针显微镜系统是一种三维表面工具。它代表着扫描探针显微镜在超精密制造中的应用方式发生了翻天覆地的变化。

The objective of this award is to investigate the static and dynamic characteristics of magnetically actuated compliant micromanipulators and to realize innovative design and advanced control, enabling multi-axis scanning of three-dimensional micrometer/nanometer objects. The proposed approaches consist of three phases. First, static and dynamic models of the compliant manipulator will be developed and multi-axis magnetic actuation will be analyzed. The aim is to enable rational design and characterization of multi-axis probing systems. Second, advanced control schemes will be developed to enable multi-axis scanning of three-dimensional objects. The multi-axis scanning scheme can operate at contact mode as well as tapping mode. Third, a two-axis scanning probe microscopic system will be realized. Compared to other attempts to achieve greater access to three-dimensional samples, which use specialized probes and require a priori knowledge of the pose and nominal geometry of the sample, the two-axis scanning probe microscopic system can be employed to scan three-dimensional objects with unknown geometry. Upon successful completion, technological innovations created from this award will open up important new research applications in manufacturing. Compared to conventional scanning probe microscopes, which are two-dimensional planar tools, the two-axis scanning probe microscopic system is a three-dimensional surface tool. It represents a transformational change in how scanning probe microscopy can be used in ultra precision manufacturing.