A Coordinate Measuring Machine for Three-Dimensional Micro Devices

三维微型器件三坐标测量机

• 批准号: 0727736
• 负责人: Chia-Hsiang Menq
• 金额: $ 39.06万
• 依托单位: Ohio State University Research Foundation -DO NOT USE
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-07-01 至 2011-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0727736&HistoricalAwards=false
• 关键词: Coordinate; Measuring; Machine; Three; Dimensional

The objective of this research project is to create a coordinate measuring machine that enables rapid acquisition of three-dimensional coordinate data of engineered devices consisting of geometrically complicated micro/nano features. The approach consists of three technological innovations. The first one is the design of a novel multi-axis probing system, which can simultaneously control the tip position and tip orientation, and which enables rapid surface digitization of three-dimensional structures. It can regulate the orientation of the tip according to the surface normal of the sample, and thus precisely control the tip-sample interaction point when digitizing surfaces that have large geometric variations. The second innovation is a dual-actuator tip-motion control scheme which achieves high bandwidth tip-motion control. It aims to make the entire cantilever bandwidth of the probe available for rapid coordinate acquisition. The third innovation is to integrate the multi-axis probing system with an ultra precision six-axis motion control stage to realize a multi-axis coordinate machine.Upon successful completion, the technological innovations will have significant impact on advanced instrumentation and modern manufacturing technology. It will add a new dimension to scanning probe microscopy in general and enable three-dimensional coordinate metrology of micro devices in particular. The acquired coordinate data will facilitate the design and production of three-dimensional engineered devices in terms of dimensional control, tolerancing, and uncertainty analysis.

本研究项目的目标是创建一个坐标测量机，使工程设备的三维坐标数据的快速采集组成的几何复杂的微/纳米功能。该方法包括三项技术创新。第一个是一种新型的多轴探测系统的设计，它可以同时控制尖端的位置和方向，并使快速的三维结构的表面数字化。它可以根据样品的表面法线调节针尖的方向，从而在数字化具有较大几何变化的表面时精确控制针尖-样品相互作用点。第二个创新是一个双执行器尖运动控制方案，实现高带宽尖运动控制。它的目的是使整个悬臂梁带宽的探头可用于快速坐标采集。第三项创新是将多轴测头系统与超精密六轴运动控制平台相结合，实现多轴坐标机床，该技术创新一旦成功完成，将对先进仪器仪表和现代制造技术产生重大影响。它将增加一个新的层面，扫描探针显微镜一般，使三维坐标计量的微型器件特别。所获得的坐标数据将有助于三维工程设备的设计和生产的尺寸控制，公差和不确定性分析。