An Ultra Precision Interferometric System for Real-Time Measurement and Control of Six-Degree-of-Freedom Motion

该项目的目标是开发一种能够高精度/高速测量六自由度运动的先进测量系统。该测量系统的特点是集成了高分辨率干涉测量系统、先进的计算算法、实时计算软件和相关的电子设备。为实现项目目标，确定了三个研究目标和一个开发目标：(1)干涉测量系统的设计与实现；(2)计量对准的分析与校准；(3)信息集成的实时计算算法的开发；(4)实时电子与系统集成的实现。测量系统将与磁悬浮致动器集成，以方便致动器的必要反馈控制，并说明测量系统在精度和速度方面的所需特性。该项目预计将对传感器技术、坐标计量、精密运动控制和纳米制造等领域产生影响。所开发的测量系统可以与其他设备集成，形成新的测量工具和高精度机械。

The goal of this project is to develop an advanced measuring system that is capable of high-precision/high-speed measurement of six-degree-of-freedom motion. This measuring system is characterized by an integrated use of high-resolution interferometric system, advanced computational algorithms, real-time computational software, and the associated electronics. In order to accomplish the goal of the project, three research objectives and one development objective are identified: (1) design and implementation of interferometric systems, (2) analysis and calibration of metrology alignment, (3) development of real-time computational algorithms for information integration, and (4) implementation of real-time electronics and system integration. The measuring system will be integrated with a magnetic suspension actuator to facilitate the necessary feedback control of the actuator and to illustrate the desired characteristics of the measuring system in terms of precision and speed. This project is expected to impact on the general areas of sensor technology, coordinate metrology, precision motion control, and nano-fabrications. The developed measuring system can be integrated with other equipment to form new measuring tools and high precision machinery.