An Ultra Precision Interferometric System for Real-Time Measurement and Control of Six-Degree-of-Freedom Motion

本项目的目标是开发一种先进的测量系统，能够对六自由度运动进行高精度/高速测量。该测量系统的特点是综合使用了高分辨率干涉测量系统、先进的计算算法、实时计算软件以及相关的电子设备。为了完成项目的目标，确定了三个研究目标和一个发展目标：(1)干涉系统的设计和实现，(2)测量对准的分析和校准，(3)信息集成的实时计算算法的开发，(4)实时电子和系统集成的实现。测量系统将与磁悬浮执行器集成，以便于对执行器进行必要的反馈控制，并说明测量系统在精度和速度方面所需的特性。该项目预计将对传感器技术、坐标计量学、精密运动控制和纳米制造等一般领域产生影响。研制的测量系统可以与其他设备集成，形成新的测量工具和高精度的机械设备。

The goal of this project is to develop an advanced measuring system that is capable of high-precision/high-speed measurement of six-degree-of-freedom motion. This measuring system is characterized by an integrated use of high-resolution interferometric system, advanced computational algorithms, real-time computational software, and the associated electronics. In order to accomplish the goal of the project, three research objectives and one development objective are identified: (1) design and implementation of interferometric systems, (2) analysis and calibration of metrology alignment, (3) development of real-time computational algorithms for information integration, and (4) implementation of real-time electronics and system integration. The measuring system will be integrated with a magnetic suspension actuator to facilitate the necessary feedback control of the actuator and to illustrate the desired characteristics of the measuring system in terms of precision and speed. This project is expected to impact on the general areas of sensor technology, coordinate metrology, precision motion control, and nano-fabrications. The developed measuring system can be integrated with other equipment to form new measuring tools and high precision machinery.