MRI: Acquisition of an oxide molecular beam epitaxy system

技术摘要加州大学圣巴巴拉分校（UCSB）的氧化物研究项目涵盖了广泛的应用领域，包括介电材料、半导体、热电材料和记忆器件。这些研究活动中的许多都是跨学科项目和中心的核心，并且都支持研究生的教育和培训。这些方案要求氧化薄膜具有低缺陷密度、高纯度、与有源电子器件结构兼容、低界面陷阱状态和近单层控制层厚度。为了满足这些需求，我们建议获得一种通用的，最先进的氧化物分子束外延（MBE）系统，该系统将大大扩展合成高度完美的氧化物薄膜和结构的能力，因为需要解决开发新的氧化物器件和氧化物结构的材料物理中的关键问题。该项目将通过开发解决化学计量控制和成分挥发性差等问题的方法，促进氧化物MBE的发展。与UCSB MBE实验室的传统保持一致，拟议的氧化物MBE系统旨在促进兼容性和可访问性，并将作为共享设施运行，影响UCSB和合作机构跨学科研究项目中大量学生的培训。研究生和博士后学者是主要用户，氧化物MBE将成为许多博士论文的中心焦点。两名开发工程师提供MBE实践培训，而正式培训由研究生课程和每周MBE研讨会提供。氧化物MBE系统将通过针对少数族裔的本科生和高中生的教育项目，显著扩大研究实习机会。加州大学圣巴巴拉分校（UCSB）的氧化物材料研究项目涵盖了广泛的应用领域，如新型电子设备和能量转换。这些研究活动中的许多都是跨学科项目和中心的核心，并且都支持研究生的教育和培训。这些计划要求薄膜氧化物的沉积具有极低的缺陷密度和高纯度，可与传统半导体材料的标准相媲美。为了满足这些需求，我们建议获得一个通用的，最先进的分子束外延（MBE）系统，用于薄膜氧化物的沉积。为了保持UCSB MBE实验室的传统，拟议的氧化物MBE系统将作为一个共享设施运行，影响UCSB和合作机构在广泛的跨学科研究项目中大量学生的教育和培训。研究生和博士后学者是主要用户。两名开发工程师提供MBE实践培训，而正式培训由研究生课程和每周MBE研讨会提供。氧化物MBE系统将通过针对少数族裔的本科生和高中生的教育项目，显著扩大研究实习机会。

Technical AbstractResearch programs in oxides at the University of California, Santa Barbara (UCSB) span a wide range of applications, including as dielectrics, semiconductors, thermoelectrics and memristive devices. Many of these research activities are central to interdisciplinary programs and centers and all support graduate student education and training. These programs require oxide thin films with low defect densities, high purity, compatibility with active electronic device structures, low interface trap states and near-monolayer control over layer thicknesses. To address these needs, we propose to acquire a versatile, state-of-the-art oxide molecular beam epitaxy (MBE) system that will significantly expand capabilities for the synthesis of highly-perfect oxide thin films and structures, as needed to solve key problems in the development of new devices with oxides and in the materials physics of oxide structures. The project will contribute to advancing oxide MBE through the development of approaches to address issues such as stoichiometry control and poor volatility of constituents. In keeping with the tradition of UCSB's MBE Laboratory, the proposed oxide MBE system is designed to facilitate compatibility and accessibility and will be operated as a shared facility, impacting the training of a large number of students in interdisciplinary research programs at UCSB and at collaborating institutions. Graduate students and postdoctoral scholars are the primary users and oxide MBE will be the central focus of many Ph.D. dissertations. Two development engineers provide hands-on training in MBE while formal training is provided by a graduate course and weekly MBE seminars. The oxide MBE system will significantly expand research internship opportunities offered through education programs that target undergraduate and high-school students from underrepresented minority groups.Non-Technical AbstractResearch programs in oxide materials at the University of California, Santa Barbara (UCSB) span a wide range of applications, such as new electronic devices and energy conversion. Many of these research activities are central to interdisciplinary programs and centers and all support graduate student education and training. These programs require the deposition of thin film oxides with exceptionally low defect densities and high purity, comparable to what is now standard for conventional semiconductor materials. To address these needs, we propose to acquire a versatile, state-of-the-art molecular beam epitaxy (MBE) system for the deposition of thin film oxides. In keeping with the tradition of UCSB's MBE Laboratory, the proposed oxide MBE system will be operated as a shared facility, impacting the education and training of a large number of students in a wide range of interdisciplinary research programs at UCSB and at collaborating institutions. Graduate students and postdoctoral scholars are the primary users. Two development engineers provide hands-on training in MBE while formal training is provided by a graduate course and weekly MBE seminars. The oxide MBE system will significantly expand research internship opportunities offered through education programs that target undergraduate and high-school students from underrepresented minority groups.