Collaborative Research: Defects Driven Reliability Modeling and Stress Burn-in Optimization in Nanoelectronics Manufacturing
合作研究:纳米电子制造中缺陷驱动的可靠性建模和应力老化优化
基本信息
- 批准号:1633500
- 负责人:
- 金额:$ 17.86万
- 依托单位:
- 依托单位国家:美国
- 项目类别:Standard Grant
- 财政年份:2016
- 资助国家:美国
- 起止时间:2016-09-01 至 2020-08-31
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
Yield and reliability are critical factors in determining the success of nanoelectronics manufacturing. They are traditionally evaluated separately based on different sources of information. Yield is generally estimated based on process control data such as measurements of manufacturing defects; while reliability prediction generally relies on lifetime data obtained from reliability tests. It is difficult to implement an end-of-line reliability assessment approach at early stages of a product's life cycle when data are limited. If successful, this research will enable a unified framework for managing yield, reliability, and stress burn-in in nanoelectronics manufacturing using process-control data. In addition, the integrated research and education plan associated with this award will provide interdisciplinary education and research opportunities for students from the underrepresented and impoverished Appalachian Ohio area and promote STEM education through K-12 outreach activities. This award focuses on yield and reliability of nanoelectronics products via spatiotemporal modeling of defects. The spatial modeling and temporal modeling of defects refer to modeling of the spatial distribution of defects and modeling of the growth of defects with time when devices are subject to stresses, respectively. A multidisciplinary team consisting of two PIs with expertise in nanoelectronics manufacturing and reliability engineering, respectively, is formed. Systematic accelerated destructive degradation tests followed by detailed physics-of-failure analysis will be conducted to explore failure mechanisms and to derive physics-based random defect-growth models. New yield models will be built based on the knowledge of defect size distribution and spatial distribution of defects. New reliability models will be suggested based on the defect-growth mechanisms and models. The reliability models will lead to new burn-in procedures. Ultra-narrow copper interconnect lines with sub 100 nanometers width prepared from a plasma-based etch process will be used as the testbed for the methodology.
成品率和可靠性是决定纳米电子制造成功的关键因素。传统上,它们是根据不同的信息来源单独评估的。成品率通常基于过程控制数据(诸如制造缺陷的测量)来估计;而可靠性预测通常依赖于从可靠性测试获得的寿命数据。在产品生命周期的早期阶段,当数据有限时,很难实施下线可靠性评估方法。如果成功的话,这项研究将使一个统一的框架,管理产量,可靠性和应力老化在纳米电子制造使用过程控制数据。此外,与此奖项相关的综合研究和教育计划将为来自代表性不足和贫困的阿巴拉契亚俄亥俄州地区的学生提供跨学科教育和研究机会,并通过K-12外展活动促进STEM教育。该奖项的重点是通过缺陷的时空建模的纳米电子产品的产量和可靠性。缺陷的空间建模和时间建模分别是指当器件经受应力时,缺陷的空间分布的建模和缺陷随时间的增长的建模。一个多学科的团队组成的两个PI与纳米电子制造和可靠性工程的专业知识,分别形成。将进行系统的加速破坏性降解试验,然后进行详细的失效物理分析,以探索失效机制,并推导出基于物理的随机缺陷增长模型。新的成品率模型将建立在缺陷尺寸分布和缺陷空间分布知识的基础上。基于缺陷增长机理和模型,提出了新的可靠性模型。可靠性模型将导致新的老化程序。超窄铜互连线与子100纳米的宽度从基于等离子体的蚀刻工艺制备将被用作测试平台的方法。
项目成果
期刊论文数量(4)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
Statistical Models of Overdispersed Spatial Defects for Predicting the Yield of Integrated Circuits
预测集成电路良率的过分散空间缺陷统计模型
- DOI:10.1109/tr.2019.2943925
- 发表时间:2020
- 期刊:
- 影响因子:5.9
- 作者:Yuan, Tao;Bae, Suk Joo;Kuo, Yue
- 通讯作者:Kuo, Yue
A Differential Burn-in Policy Considering Nonhomogeneous Distribution of Spatial Defects in Semiconductor Manufacturing
考虑半导体制造中空间缺陷非均匀分布的差分老化策略
- DOI:10.1109/aparm49247.2020.9209427
- 发表时间:2020
- 期刊:
- 影响因子:0
- 作者:Yuan, Tao;Chen, Yuan;Kuo, Yue
- 通讯作者:Kuo, Yue
Plasma-Based Copper Etch Process and Reliability
等离子铜蚀刻工艺和可靠性
- DOI:10.1149/08506.0165ecst
- 发表时间:2018
- 期刊:
- 影响因子:0
- 作者:Gao, Baizhen;Gao, Yong;Kuo, Yue;Yuan, Tao
- 通讯作者:Yuan, Tao
A Yield-Reliability Relation Modeling Approach based on Random Effects Degradation Models
基于随机效应退化模型的产量-可靠性关系建模方法
- DOI:
- 发表时间:2017
- 期刊:
- 影响因子:0
- 作者:Yuan, T;Zhu, X;Kuo, Y
- 通讯作者:Kuo, Y
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Tao Yuan其他文献
Physical Modeling of Self-RoIled-up Nanomembrane RF Inductors with High Precision
高精度自卷式纳米膜射频电感器的物理建模
- DOI:
10.1109/iws55252.2022.9977833 - 发表时间:
2022 - 期刊:
- 影响因子:0
- 作者:
Zhikun Zhou;Qizhen Wang;Jinghui Yu;W. He;Tao Yuan;L. Sang;Wen Huang;Xiaochen Chen - 通讯作者:
Xiaochen Chen
Association between triclosan exposure and obesity measures among 7-year-old children in northern China
中国北方7岁儿童三氯生暴露与肥胖指标的关系
- DOI:
10.1016/j.ecoenv.2022.113610 - 发表时间:
2022 - 期刊:
- 影响因子:6.8
- 作者:
Yi Hu;Guodong Ding;Cheng Lv;Qianlong Zhang;Yan Zhang;Tao Yuan;Junjie Ao;Yu Gao;Yankai Xia;Xiaodan Yu;Ying Tian - 通讯作者:
Ying Tian
Identification and functional characterization of a novel BEL1-LIKE homeobox transcription factor GmBLH4 in soybean
大豆中新型 BEL1-LIKE 同源盒转录因子 GmBLH4 的鉴定和功能表征
- DOI:
10.1007/s11240-018-1419-4 - 发表时间:
2018 - 期刊:
- 影响因子:0
- 作者:
Tao Yuan;Chen Ming;Shu Yingjie;Zhu Yajing;Wang Shuang;Huang Liyan;Yu Xingwang;Wang Zhankui;Qian Peipei;Gu Weihong;Ma Hao - 通讯作者:
Ma Hao
Narrow-Band QD-Enhanced PIN Metal-Oxide Heterostructure Phototransistor with the Assistance of Printing Processes
印刷工艺辅助的窄带量子点增强PIN金属氧化物异质结构光电晶体管
- DOI:
10.1002/adom.201901472 - 发表时间:
2020 - 期刊:
- 影响因子:9
- 作者:
Liu Xiang;Zhou Wenxing;Tao Yuan;Mao Lei;Chang Jianhua;Hu Hai;Li Chi;Dai Qing - 通讯作者:
Dai Qing
Preparation of artificial red cell and its application on alleviation of tumor hypoxia
人工红细胞的制备及其在缓解肿瘤缺氧中的应用
- DOI:
10.1016/j.colsurfb.2017.09.039 - 发表时间:
2017 - 期刊:
- 影响因子:0
- 作者:
Qu Jiaxin;Guo Xiaomeng;Li Wei;Hou Wanqing;Zhang Hanbo;Luo Lihua;Zhu Chunqi;Yang Jie;Yin Xiaoyi;Tao Yuan;Du Yongzhong;Lou Yan;Chen Dawei;You Jian - 通讯作者:
You Jian
Tao Yuan的其他文献
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{{ truncateString('Tao Yuan', 18)}}的其他基金
RAPID: Sodium (Na) Lidar Validation of MIGHTI Daytime Temperature Observations Onboard NASA ICON Satellite
RAPID:钠 (Na) 激光雷达验证 NASA ICON 卫星上的 MIGHTI 白天温度观测
- 批准号:
2125712 - 财政年份:2021
- 资助金额:
$ 17.86万 - 项目类别:
Standard Grant
EAGER: Exploratory Measurements of Large Winds and Shears in the Lower Thermosphere and Their Variability Using an Enhanced Sodium Lidar
EAGER:使用增强型钠激光雷达探索性测量低层热层的大风和切变及其变化
- 批准号:
1954308 - 财政年份:2019
- 资助金额:
$ 17.86万 - 项目类别:
Standard Grant
Fundamental Coupling Processes in the Mesosphere, Lower Thermosphere (MLT) Using Enhanced Na Wind-temperature Lidar Measurements at the Atmospheric Lidar Observatory
使用大气激光雷达观测站增强型 Na 风温激光雷达测量来研究中间层、低热层 (MLT) 的基本耦合过程
- 批准号:
1734333 - 财政年份:2017
- 资助金额:
$ 17.86万 - 项目类别:
Standard Grant
Collaborative Research: A Consortium of Resonance and Rayleigh Lidars
合作研究:共振和瑞利激光雷达联盟
- 批准号:
1135882 - 财政年份:2012
- 资助金额:
$ 17.86万 - 项目类别:
Continuing Grant
Collaborative Research: A Consortium of Resonance and Rayleigh Lidars
合作研究:共振和瑞利激光雷达联盟
- 批准号:
1041571 - 财政年份:2010
- 资助金额:
$ 17.86万 - 项目类别:
Continuing Grant
Collaborative Research: Nonparametric Bayesian Modeling of Reliability of Nonelectronics
合作研究:非电子产品可靠性的非参数贝叶斯建模
- 批准号:
0926420 - 财政年份:2009
- 资助金额:
$ 17.86万 - 项目类别:
Standard Grant
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