Collaborative Research: Defects Driven Reliability Modeling and Stress Burn-in Optimization in Nanoelectronics Manufacturing

合作研究：纳米电子制造中缺陷驱动的可靠性建模和应力老化优化

• 批准号: 1633500
• 负责人: Tao Yuan
• 金额: $ 17.86万
• 依托单位: Ohio University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2016
• 资助国家: 美国
• 起止时间: 2016-09-01 至 2020-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1633500&HistoricalAwards=false
• 关键词: Collaborative; Research; Defects; Driven; Reliability

Yield and reliability are critical factors in determining the success of nanoelectronics manufacturing. They are traditionally evaluated separately based on different sources of information. Yield is generally estimated based on process control data such as measurements of manufacturing defects; while reliability prediction generally relies on lifetime data obtained from reliability tests. It is difficult to implement an end-of-line reliability assessment approach at early stages of a product's life cycle when data are limited. If successful, this research will enable a unified framework for managing yield, reliability, and stress burn-in in nanoelectronics manufacturing using process-control data. In addition, the integrated research and education plan associated with this award will provide interdisciplinary education and research opportunities for students from the underrepresented and impoverished Appalachian Ohio area and promote STEM education through K-12 outreach activities. This award focuses on yield and reliability of nanoelectronics products via spatiotemporal modeling of defects. The spatial modeling and temporal modeling of defects refer to modeling of the spatial distribution of defects and modeling of the growth of defects with time when devices are subject to stresses, respectively. A multidisciplinary team consisting of two PIs with expertise in nanoelectronics manufacturing and reliability engineering, respectively, is formed. Systematic accelerated destructive degradation tests followed by detailed physics-of-failure analysis will be conducted to explore failure mechanisms and to derive physics-based random defect-growth models. New yield models will be built based on the knowledge of defect size distribution and spatial distribution of defects. New reliability models will be suggested based on the defect-growth mechanisms and models. The reliability models will lead to new burn-in procedures. Ultra-narrow copper interconnect lines with sub 100 nanometers width prepared from a plasma-based etch process will be used as the testbed for the methodology.

成品率和可靠性是决定纳米电子制造成功的关键因素。传统上，它们是根据不同的信息来源单独进行评估的。成品率通常是根据过程控制数据估计的，例如制造缺陷的测量；而可靠性预测通常依赖于从可靠性测试中获得的寿命数据。在产品生命周期的早期阶段，当数据有限时，很难实施生产线结束可靠性评估方法。如果成功，这项研究将为使用过程控制数据管理纳米电子制造中的成品率、可靠性和应力老化提供一个统一的框架。此外，与该奖项相关的综合研究和教育计划将为来自代表不足和贫困的阿巴拉契亚俄亥俄州地区的学生提供跨学科教育和研究机会，并通过K-12外联活动促进STEM教育。该奖项的重点是通过缺陷的时空建模来实现纳米电子产品的成品率和可靠性。缺陷的空间建模和时间建模分别是指器件受应力时缺陷的空间分布模型和缺陷随时间增长的模型。成立了一个由两名分别具有纳米电子制造和可靠性工程专业知识的PI组成的多学科团队。将进行系统的加速破坏性退化试验，然后进行详细的失效物理分析，以探索失效机制，并推导出基于物理学的随机缺陷增长模型。在已知缺陷尺寸分布和缺陷空间分布的基础上，建立新的屈服模型。基于缺陷增长机理和模型，提出了新的可靠性模型。可靠性模型将导致新的老化程序。基于等离子体刻蚀工艺制备的宽度小于100纳米的超窄铜互连线将被用作该方法的试验台。

项目成果

Statistical Models of Overdispersed Spatial Defects for Predicting the Yield of Integrated Circuits

预测集成电路良率的过分散空间缺陷统计模型

• DOI: 10.1109/tr.2019.2943925
• 发表时间: 2020
• 期刊: IEEE Transactions on Reliability
• 影响因子: 5.9
• 作者: Yuan, Tao;Bae, Suk Joo;Kuo, Yue
• 通讯作者: Kuo, Yue

A Differential Burn-in Policy Considering Nonhomogeneous Distribution of Spatial Defects in Semiconductor Manufacturing

考虑半导体制造中空间缺陷非均匀分布的差分老化策略

• DOI: 10.1109/aparm49247.2020.9209427
• 发表时间: 2020
• 期刊: 2020 Asia-Pacific International Symposium on Advanced Reliability and Maintenance Modeling (APARM
• 作者: Yuan, Tao;Chen, Yuan;Kuo, Yue
• 通讯作者: Kuo, Yue

Plasma-Based Copper Etch Process and Reliability

等离子铜蚀刻工艺和可靠性

• DOI: 10.1149/08506.0165ecst
• 发表时间: 2018
• 期刊: ECS Transactions
• 作者: Gao, Baizhen;Gao, Yong;Kuo, Yue;Yuan, Tao
• 通讯作者: Yuan, Tao

A Yield-Reliability Relation Modeling Approach based on Random Effects Degradation Models

基于随机效应退化模型的产量-可靠性关系建模方法

• 发表时间: 2017
• 期刊: ASIA PACIFIC CONFERENCE OF THE PROGNOSTICS AND HEALTH MANAGEMENT SOCIETY 2017
• 作者: Yuan, T;Zhu, X;Kuo, Y
• 通讯作者: Kuo, Y