Collaborative Research: Highly Ordered Nanoscale Patterns Produced by Ion Bombardment of Solid Surfaces: Theory and Experiment

合作研究：离子轰击固体表面产生的高度有序的纳米级图案：理论与实验

• 批准号: 2117509
• 负责人: Karl Ludwig
• 金额: $ 31.5万
• 依托单位: Trustees of Boston University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2022
• 资助国家: 美国
• 起止时间: 2022-01-01 至 2024-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2117509&HistoricalAwards=false
• 关键词: Collaborative; Research; Highly; Ordered; Nanoscale

When a flat solid surface is bombarded with a broad ion beam, patterns can emerge spontaneously, including surface ripples with a wavelength as short as one ten-thousandth of the width of a human hair. If the patterns formed were not almost always disordered, this fascinating type of self-organization could become a widely employed method of fabricating structures with feature sizes too small to be produced by conventional techniques. A central goal of this collaborative theoretical and experimental research is therefore to develop and refine methods of producing highly ordered surface ripples by ion bombardment. Surfaces patterns of this kind could be used in a variety of applications, including ones in which extreme ultraviolet light must be manipulated or analyzed. This project involves graduate, undergraduate and high school students who are working in a field that bridges basic research and applications. In addition to experiencing, and contributing to, an important topic in current materials research, the students are learning to use a wide range of theoretical, simulation and materials characterization tools that will translate well to future careers in industry or academia. Beyond working with the materials research communities at their home institutions, the project is providing the students with a broader perspective through participation in the exciting, multi-disciplinary environments at national x-ray scattering facilities.This collaboration brings together two principal investigators who have individually made seminal theoretical and experimental contributions to the field of ion beam nanopatterning, producing a team that is uniquely positioned to advance the field. Two key strategies are being employed in working toward the goal of producing surface ripples with an exceptional degree of order. These strategies are also leading to important steps forward in our understanding of the fundamental processes that take place during ion bombardment. The first strategy is to study the onset of pattern formation that occurs as the angle of ion incidence or the sample temperature is varied through a threshold value. Near-threshold behavior is being examined in three different regimes: 1) the higher energy regime in which sputtering is important; 2) the low-energy regime in which sputtering is negligible, a largely unexplored frontier of the field; and 3) the high-temperature regime in which the surface remains crystalline, resulting in better quality material for electronic/photonic applications. The equation of motion becomes simpler near these transitions and can be rigorously derived. In addition, it has a high degree of universality, i.e., it is to a large extent independent of the choice of target material and ion species. Studying near-threshold behavior was the key to making fundamental advances in the theory of phase transitions, and the same is proving to be true for ion-induced pattern formation. Finally, and most importantly, almost perfectly ordered ripple patterns are in certain circumstances predicted to form close to threshold. The second central strategy of the project is to exploit the power of real-time x-ray scattering. The extreme sensitivity of grazing-incidence small-angle x-ray scattering to surface disturbances makes it an ideal method to study the near-threshold behavior of the nanopatterns and to rigorously test the theory. Moreover, the research team is taking advantage of the increasing coherent x-ray flux available at new and upgraded synchrotron sources to develop coherent x-ray scattering as a powerful new approach to investigating surface dynamics at the nanoscale. Coherent scattering gives entirely new insight, going beyond study of the average surface evolution to measure the time-dependent fluctuations of the microstructure around the average kinetics, enabling novel tests of the detailed theoretical predictions.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

当一个平坦的固体表面被宽离子束轰击时，图案可以自发地出现，包括波长短至人类头发宽度的万分之一的表面波纹。如果形成的图案不总是无序的，这种迷人的自组织类型可能会成为一种广泛使用的制造结构的方法，这些结构的特征尺寸太小，无法用传统技术制造。因此，这种合作的理论和实验研究的一个中心目标是开发和改进通过离子轰击产生高度有序的表面波纹的方法。这种表面图案可用于各种应用，包括必须操纵或分析极紫外光的应用。该项目涉及研究生，本科生和高中生谁是在一个领域，桥梁基础研究和应用工作。除了体验当前材料研究中的一个重要主题并为其做出贡献外，学生们还学习使用广泛的理论、模拟和材料表征工具，这些工具将很好地转化为未来工业或学术界的职业生涯。除了与他们所在机构的材料研究社区合作外，该项目还通过参与国家X射线散射设施的令人兴奋的多学科环境为学生提供了更广阔的视野。这项合作汇集了两位主要研究人员，他们分别对离子束纳米图案领域做出了开创性的理论和实验贡献，产生一个独特的定位，以推动该领域的团队。两个关键的战略正在朝着生产表面波纹的目标，以特殊程度的秩序。这些策略也使我们对离子轰击期间发生的基本过程的理解向前迈出了重要一步。第一种策略是研究当离子入射角或样品温度通过阈值变化时发生的图案形成的开始。近阈值行为正在三个不同的区域中进行研究：1）溅射很重要的较高能量区域; 2）溅射可以忽略不计的低能量区域，这是该领域尚未探索的前沿;以及3）高温区域，其中表面保持结晶状态，从而为电子/光子应用提供更好的质量材料。运动方程在这些转变附近变得更简单，并且可以严格推导。此外，它具有高度的通用性，即，其在很大程度上与靶材料和离子种类的选择无关。研究近阈值行为是相变理论取得根本性进展的关键，对于离子诱导图案形成也是如此。最后，也是最重要的是，在某些情况下，几乎完全有序的涟漪图案被预测形成接近阈值。该项目的第二个核心策略是利用实时X射线散射的力量。掠入射小角度X射线散射对表面扰动的极端敏感性使其成为研究纳米粒子近阈值行为和严格测试理论的理想方法。此外，研究小组正在利用新的和升级的同步加速器源提供的不断增加的相干x射线通量，开发相干x射线散射作为一种强大的新方法来研究纳米级的表面动力学。相干散射提供了全新的见解，超越了平均表面演化的研究，测量了平均动力学周围微观结构随时间变化的波动，实现了详细理论预测的新颖测试。该奖项反映了NSF的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。

项目成果

In situ GISAXS observation of ion-induced nanoscale pattern formation on crystalline Ge(001) in the reverse epitaxy regime

反向外延体系中离子诱导的晶体 Ge(001) 纳米级图案形成的原位 GISAXS 观察

• DOI: 10.1103/physrevb.104.235434
• 发表时间: 2021
• 期刊: Physical Review B
• 影响因子: 3.7
• 作者: Erb, Denise J.;Myint, Peco;Evans-Lutterodt, Kenneth;Ludwig, Karl;Facsko, Stefan
• 通讯作者: Facsko, Stefan