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Real-time X-ray Studies of Surface Evolution During Ion Bombardment and Plasma Processing

Real-time X-ray Studies of Surface Evolution During Ion Bombardment and Plasma Processing
离子轰击和等离子体处理过程中表面演化的实时 X 射线研究
批准号:
0507351
负责人:
Karl Ludwig
金额:
$0.0万
依托单位国家:
美国
项目类别:
Continuing Grant
财政年份:
2005
资助国家:
美国
项目状态:
已结题
起止时间:
2005-07-01 至 2009-06-30

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中文摘要
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英文摘要
TECHNICAL EXPLANATION This project addresses fundamentals of surface processes during ion bombardment. Theoretical and experimental work has shown it to be a complex process, leading in some cases to well-defined surface instabilities that produce structures on length scales from 10 to 1000 nm. This project addresses fundamental issues about the dominant processes acting and their effects in particular situations. Real-time investigations of surface evolution during processing have natural advantages over post facto studies, and the PI has developed a unique facility at the National Synchrotron Light Source (NSLS) of Brookhaven National Laboratory for real-time investigation of surface processing. This approach is expected to enable detailed studies of how surface morphology changes during ion bombardment. The project aims to better understand a wide range of materials behavior during ion bombardment and, ultimately, plasma processing. While maintaining close contact with collaborators performing theory and simulations, studies will be made into the effects of stress on surface evolution during ion bombardment, the nature of ion-enhanced surface relaxation, the evolution of lithographically fabricated nanoscale structures during ion bombardment, and the structural evolution of compound semiconductors during ion bombardment both with and without sample rotation. NON-TECHNICAL EXPLANATIONThe project addresses fundamental materials research with strong technological relevance to electronics and photonics, and effectively integrates research and education. As part of this research project, students at the graduate, undergraduate and high school levels will be involved in learning about scientific and technological issues at the forefront of current materials research. Through continuing collaborations with scientists at national labs and other universities, these students will have special opportunities to participate in a broad spectrum of research environments. The program includes support for two graduate students performing their doctoral research in these areas. It is anticipated that 1-2 undergraduate students will be actively engaged with the program at any given time. The PI also, through Boston University's existing summer High School Honor's program, expects to mentor a high school student in the project each year.
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REU Site: BU-PRO: Boston University Physics Research Opportunities
  • 批准号:
    2244795
  • 项目类别:
    Standard Grant
  • 资助金额:
    $51.59万
  • 财政年份:
    2023
  • 负责人:
    Karl Ludwig
  • 依托单位:
Collaborative Research: Highly Ordered Nanoscale Patterns Produced by Ion Bombardment of Solid Surfaces: Theory and Experiment
  • 批准号:
    2117509
  • 项目类别:
    Continuing Grant
  • 资助金额:
    $31.5万
  • 财政年份:
    2022
  • 负责人:
    Karl Ludwig
  • 依托单位:
REU Site: BU-PRO: Boston University Physics Research Opportunities
  • 批准号:
    1852266
  • 项目类别:
    Continuing Grant
  • 资助金额:
    $33.58万
  • 财政年份:
    2019
  • 负责人:
    Karl Ludwig
  • 依托单位:
Coherent X-ray Studies of Surface Growth and Patterning Processes
  • 批准号:
    1709380
  • 项目类别:
    Standard Grant
  • 资助金额:
    $27.11万
  • 财政年份:
    2017
  • 负责人:
    Karl Ludwig
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