Development of a System for Studies of Surface Structure during Plasma Processing and Student Training

等离子体处理和学生培训期间表面结构研究系统的开发

• 批准号: 0114154
• 负责人: Karl Ludwig
• 金额: $ 8.4万
• 依托单位: Trustees of Boston University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-08-01 至 2004-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0114154&HistoricalAwards=false
• 关键词: Development; System; Studies; Surface; Structure

This award from the Instrumentation for Materials Research Program in DMR supports instrument development and student training at Boston University. The new system under development will enable, for the first time, the in-situ study with synchrotron x-ray radiation of materials' surface structure while undergoing plasma processing. The system will permit both a realistic plasma processing environment and the necessary diagnostic access while conforming to the space afforded by a standard four-circle diffractometer. An important advantage of the system is its portability, permitting transport between the synchrotron and other laboratories for multiple process characterizations. Initial studies with the system will concentrate on silicon surfaces undergoing high density plasma etching to address the void of data available on the structure of such surfaces. Future applications of the equipment will be directed at compound semiconductor surfaces.%%%This award from the Instrumentation for Materials Research Program in DMR supports instrument development and student training at Boston University. Faculty and students at Boston University are developing a system that will enable study of the atomic structure of surfaces as they are being bombarded by energetic particles in a set of processes known collectively as "plasma processing". Such information will advance our fundamental understanding of these important techniques that are widely used in the fabrication of integrated circuits and microwave devices. The system will allow the integration of a reactor used for plasma processing of materials into a high flux x-ray characterization facility. The high flux of x-rays will permit atomic surface structure characterization during plasma processing for the first time.

DMR材料研究计划仪器的这一奖项支持波士顿大学的仪器开发和学生培训。正在开发的新系统将首次实现在进行等离子体处理时用同步加速器X射线辐射对材料表面结构进行原位研究。 该系统将允许一个现实的等离子体处理环境和必要的诊断访问，同时符合标准的四圆衍射仪提供的空间。 该系统的一个重要优点是其便携性，允许同步加速器和其他实验室之间的多个过程表征的运输。 该系统的初步研究将集中在进行高密度等离子体蚀刻的硅表面上，以解决此类表面结构上可用数据的空白。该设备的未来应用将针对化合物半导体表面。DMR材料研究计划仪器的这一奖项支持波士顿大学的仪器开发和学生培训。波士顿大学的教师和学生正在开发一种系统，该系统将能够研究表面的原子结构，因为它们在一组统称为“等离子体处理”的过程中被高能粒子轰击。 这些信息将促进我们对这些广泛用于集成电路和微波器件制造的重要技术的基本了解。 该系统将允许将用于材料等离子体处理的反应器集成到高通量X射线表征设施中。 高通量的X射线将首次允许在等离子体处理期间进行原子表面结构表征。