Development of a System for Studies of Surface Structure during Plasma Processing and Student Training

等离子体处理和学生培训期间表面结构研究系统的开发

• 批准号: 0114154
• 负责人: Karl Ludwig
• 金额: $ 8.4万
• 依托单位: Trustees of Boston University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-08-01 至 2004-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0114154&HistoricalAwards=false
• 关键词: Development; System; Studies; Surface; Structure

This award from the Instrumentation for Materials Research Program in DMR supports instrument development and student training at Boston University. The new system under development will enable, for the first time, the in-situ study with synchrotron x-ray radiation of materials' surface structure while undergoing plasma processing. The system will permit both a realistic plasma processing environment and the necessary diagnostic access while conforming to the space afforded by a standard four-circle diffractometer. An important advantage of the system is its portability, permitting transport between the synchrotron and other laboratories for multiple process characterizations. Initial studies with the system will concentrate on silicon surfaces undergoing high density plasma etching to address the void of data available on the structure of such surfaces. Future applications of the equipment will be directed at compound semiconductor surfaces.%%%This award from the Instrumentation for Materials Research Program in DMR supports instrument development and student training at Boston University. Faculty and students at Boston University are developing a system that will enable study of the atomic structure of surfaces as they are being bombarded by energetic particles in a set of processes known collectively as "plasma processing". Such information will advance our fundamental understanding of these important techniques that are widely used in the fabrication of integrated circuits and microwave devices. The system will allow the integration of a reactor used for plasma processing of materials into a high flux x-ray characterization facility. The high flux of x-rays will permit atomic surface structure characterization during plasma processing for the first time.

DMR材料研究计划的奖项支持波士顿大学的仪器开发和学生培训。正在开发的新系统将首次实现对材料表面结构的同步X射线辐射的原位研究，同时进行血浆处理。 该系统将允许现实的等离子体处理环境和必要的诊断访问，同时符合标准的四环衍射仪提供的空间。 该系统的一个重要优点是其可移植性，允许同步加速器和其他实验室之间的运输进行多个过程特征。 对系统的初步研究将集中在经历高密度等离子体蚀刻的硅表面上，以解决有关此类表面结构可用的数据的空白。设备的未来应用将针对复合半导体表面。%% %%从DMR材料研究计划中获得此奖项，支持波士顿大学的仪器开发和学生培训。波士顿大学的教职员工和学生正在开发一个系统，该系统将在一组被称为“等离子处理”的过程中受到充满活力的粒子的轰炸，可以研究表面的原子结构。 这些信息将提高我们对这些重要技术的基本理解，这些技术广泛用于制造集成电路和微波设备。 该系统将允许将用于等离子体处理材料的反应器集成到高通量X射线表征设施中。 X射线的高通量将首次允许血浆处理过程中的原子表面结构表征。