Integrated sensor for electro-magnetic near-field scanning

用于电磁近场扫描的集成传感器

• 批准号: 25250352
• 负责人: Professor Dr.-Ing. Andreas Thiede
• 金额: --
• 依托单位: Fachgebiet Höchstfrequenzelektronik (HFE)
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2006
• 资助国家: 德国
• 起止时间: 2005-12-31 至 2010-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/25250352?language=en
• 关键词: Integrated; sensor; electro; magnetic; near

Subject of the applied project is the development of integrated probes for electro-magnetic near-field scanning of planar circuits on board, multi-chip module as well as integrated circuit level. Therefore, miniaturised probe antennae are to be monolithically combined with active electronics, such as matched buffers, amplifiers, linear pre-processing and if applicable mixers. Target operation frequency ranges up to 10 GHz. Double output probes enable significant reduction of scanning time by simultaneous measurement of two field components. Integration in GaAs-based HEMT technology offers high transit frequency, low noise figure, and most importantly a virtually lossless semi-insulating substrate, which in addition shields electronics by backside metallisation. Alternatively, SiGe HBT technology provides higher level of integration and compatibility to CMOS digital signal processing blocks. The applied project is coordinated with an NSF proposal by Prof. Richard DuBroff, University of Missouri-Rolla, United States, working towards probe arrays, and the MEDEA+ project PARACHUTE of Fraunhofer Institute for Reliability and Microintegration (IZM) Berlin, Germany, Dept. Advanced System Engineering (ASE) Paderborn, Germany, focusing on compensation algorithms as well as measurement system aspects.

应用项目的主题是用于板载平面电路、多芯片模块以及集成电路级电磁近场扫描的集成探头的研制。因此，小型化的探头天线将与有源电子设备单片结合，如匹配缓冲器、放大器、线性预处理和适当的混音器。目标工作频率范围高达10 GHz。通过同时测量两个场分量，双输出探头可显著缩短扫描时间。集成在基于GaAs的HEMT技术中提供了高传输频率、低噪声系数，最重要的是几乎无损的半绝缘衬底，它还通过背面金属化来屏蔽电子设备。作为替代方案，SiGe HBT技术为CMOS数字信号处理模块提供了更高级别的集成度和兼容性。该应用项目与美国密苏里大学罗拉分校的理查德·杜布罗夫教授提出的NSF建议相协调，致力于探测器阵列的研究，以及德国柏林弗劳恩霍夫可靠性和微集成研究所(IZM)的Medea+项目降落伞。高级系统工程(ASE)，德国帕德伯恩，专注于补偿算法以及测量系统方面。