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Nanopatterning of functional materials by transfer of nanoimprint-guided ordered block copolymer structures by means of reactive ion beam etching

通过反应离子束蚀刻转移纳米压印引导的有序嵌段共聚物结构来形成功能材料的纳米图案

基本信息

批准号：
281331116
负责人：
Professorin Dr.-Ing. Hella-Christin Scheer
金额：
--
依托单位：
Leibniz-Institut für Oberflächenmodifizierung e.V. (IOM)
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2015
资助国家：
德国
起止时间：
2014-12-31 至 2018-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/281331116?language=en
关键词：
Nanopatterning functional materials transfer nanoimprint

项目摘要

For the economic utilization of nanostructures in various technical fields also outside microelectronics simple and fast techniques are required to produce them in functional materials. Self-organizing processes basically offer suitable pre-conditions for this purpose; however, questions regarding the combination with conventional micro-technical structuring procedures, the improvement of the degree of ordering as well as the transfer of the structures into the target material still have to be answered. The purpose of the project therefore is the guided self-organization of nanostructures in block-copolymer (BCP) layers on plane substrates by means of nanoimprint. In this way the nanostructure organization of the BCPs is simultaneously linked with the microstructures and/or sub-microstructures of the imprint stamp. The imprint stamps employed for this purpose can be re-used several times, which makes the pre-structuring of each individual substrate, as it is necessary in conventional grapho- and chemo-epitaxy, superfluous. Additionally to a topographic structuring the stamps can have a chemical structuring. The objective is to identify a fast ordering process, which - starting from the stamp surface - leads to ordered cylindrical and lamellar BCP-structures. The mobility of the BCPs required for this purpose is achieved by a careful addition of solvent and/or high process temperatures; temperature gradients, thermal cycling and electric fields support the guided ordering. When a stamp-guided self-organization is realized, this replaces the nanostructuring of each substrate and thus enables a simple and fast process. The BCP-structures that are vertically-ordered in the surface region are suitably decorated and transferred to technical substrates in a multi-step-process by means of reactive ion-beam supported techniques.

为了在微电子学之外的各种技术领域中经济地利用纳米结构，需要简单而快速的技术来将它们生产成功能材料。自组织过程基本上为此目的提供了合适的先决条件;然而，关于与常规微观技术结构化过程的组合、有序度的改进以及将结构转移到目标材料中的问题仍然需要回答。因此，该项目的目的是通过纳米压印在平面基底上的嵌段共聚物（BCP）层中引导纳米结构的自组织。以这种方式，BCP的纳米结构组织同时与压印印模的微结构和/或子微结构相关联。用于此目的的压印印模可以重复使用多次，这使得每个单独的衬底的预结构化多余，因为这在常规的石墨外延和化学外延中是必要的。除了地形结构化之外，印模还可以具有化学结构化。我们的目标是确定一个快速的排序过程，这-从邮票表面开始-导致有序的圆柱形和层状BCP结构。通过仔细添加溶剂和/或高工艺温度，可实现此目的所需BCP的流动性;温度梯度、热循环和电场支持引导排序。当实现冲压引导的自组织时，这取代了每个衬底的纳米结构化，从而实现了简单而快速的工艺。在表面区域中垂直有序的BCP结构通过反应性离子束支持技术在多步骤工艺中被适当地装饰和转移到技术衬底。

项目成果

期刊论文数量（4）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Challenges with soft stamps for guiding of diblock copolymers

用于引导二嵌段共聚物的软印模面临的挑战

DOI：
10.1007/s00339-015-9409-4
发表时间：
2015
期刊：
Applied Physics A
影响因子：
0
作者：
C. Steinberg;M. Gubert;M. Papenheim;S. Wang;H.-C. Scheer;J. Zajadacz;K. Zimmer
通讯作者：
K. Zimmer

Imprint strategy for directed self-assembly of block copolymers

嵌段共聚物定向自组装的印迹策略

DOI：
10.1016/j.mee.2017.02.003
发表时间：
2017
期刊：
Microelectronic Engineering
影响因子：
2.3
作者：
A. Mayer;D. Blensgens;J. Rond;C. Steinberg;M. Papenheim;S. Wang;J. Zajadacz;K. Zimmer;H.-C. Scheer
通讯作者：
H.-C. Scheer

Towards fast nanopattern fabrication by local laser annealing of block copolymer (BCP) films

通过嵌段共聚物 (BCP) 薄膜的局部激光退火实现快速纳米图案制造

DOI：
10.1016/j.apsusc.2018.11.105
发表时间：
2019
期刊：
Applied Surface Science
影响因子：
6.7
作者：
K. Zimmer;J. Zajadacz;F. Frost;A. Mayer;C. Steinberg;H.-F. Chang;J.-Y. Cheng;H.-C. Scheer
通讯作者：
H.-C. Scheer

Electrically-assisted nanoimprint of block copolymers