Nanopatterning of functional materials by transfer of nanoimprint-guided ordered block copolymer structures by means of reactive ion beam etching

为了在微电子技术以外的各个技术领域经济地利用纳米结构，在功能材料中生产纳米结构需要简单和快速的技术。自组织过程基本上为此目的提供了合适的先决条件；然而，如何与传统的微技术结构程序相结合，如何提高有序度，以及如何将结构转移到目标材料中，这些问题仍有待解决。因此，该项目的目的是通过纳米压印的方法在平面基片上的嵌段共聚物（BCP）层中引导纳米结构的自组织。通过这种方式，bcp的纳米结构组织同时与印迹的微观结构和/或亚微观结构联系在一起。用于此目的的压印邮票可以重复使用多次，这使得每个衬底的预结构，因为它是传统的石墨和化学外延所必需的，是多余的。除了地形结构外，邮票还可以具有化学结构。目标是确定一个快速订购过程，其中-从邮票表面开始-导致有序的圆柱形和层状bcp结构。为此目的所需的bcp的迁移性是通过小心添加溶剂和/或高工艺温度来实现的；温度梯度、热循环和电场支持引导排序。当印章引导的自组织实现时，它取代了每个衬底的纳米结构，从而实现了一个简单而快速的过程。在表面区域垂直有序的bcp结构被适当修饰，并通过反应离子束支持技术在多步骤过程中转移到技术基板上。

For the economic utilization of nanostructures in various technical fields also outside microelectronics simple and fast techniques are required to produce them in functional materials. Self-organizing processes basically offer suitable pre-conditions for this purpose; however, questions regarding the combination with conventional micro-technical structuring procedures, the improvement of the degree of ordering as well as the transfer of the structures into the target material still have to be answered. The purpose of the project therefore is the guided self-organization of nanostructures in block-copolymer (BCP) layers on plane substrates by means of nanoimprint. In this way the nanostructure organization of the BCPs is simultaneously linked with the microstructures and/or sub-microstructures of the imprint stamp. The imprint stamps employed for this purpose can be re-used several times, which makes the pre-structuring of each individual substrate, as it is necessary in conventional grapho- and chemo-epitaxy, superfluous. Additionally to a topographic structuring the stamps can have a chemical structuring. The objective is to identify a fast ordering process, which - starting from the stamp surface - leads to ordered cylindrical and lamellar BCP-structures. The mobility of the BCPs required for this purpose is achieved by a careful addition of solvent and/or high process temperatures; temperature gradients, thermal cycling and electric fields support the guided ordering. When a stamp-guided self-organization is realized, this replaces the nanostructuring of each substrate and thus enables a simple and fast process. The BCP-structures that are vertically-ordered in the surface region are suitably decorated and transferred to technical substrates in a multi-step-process by means of reactive ion-beam supported techniques.