Ion beam tailoring of phase change materials for metasurfaces

超表面相变材料的离子束裁剪

• 批准号: 389346299
• 负责人: Professor Dr. Carsten Ronning
• 金额: --
• 依托单位: School of Mechanical Engineering
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2018
• 资助国家: 德国
• 起止时间: 2017-12-31 至 2021-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/389346299?language=en
• 关键词: Ion; beam; tailoring; phase; change

Metasurfaces are artificially structured and optically thin films, which can be precisely engineered to control the amplitude, polarization, or phase of light beams. Metasurfaces enable flat optics and will revolutionize photonics, as conventional litho¬graphy and deposition methods can be used to fabricate devices from simple planar to complex optical systems. Within this project we will first study the ion-solid-interaction in phase change (GeSbTe) and phase transition (VO2 and SmNiO3) materials, as these materials undergo a large optical contrast upon phase transition from their respective metallic to insulating phase. To control the phase transition, we will systematically study the dependence of the ion beam parameters on the change of the optical properties in these materials. Secondly, metasurfaces for a broad and tun¬able spectral range will be designed by selective doping or defect engineering of these materials making use of ion beam irradiation either through sub¬wave¬length-patterned masks or by direct writing using a focused ion beam. Finally, as selective doping and defect engineering by ion irradiation enables inherently flat metasurfaces, three-dimensional hierarchical systems can be build layer by layer at the end of the project: a long-term vision in optics.

亚表面是人工构造的光学薄膜，可以精确地设计来控制光束的幅度、偏振或相位。超表面实现了平面光学，并将给光子学带来革命性的变化，因为传统的光刻和沉积方法可以用来制造从简单的平面到复杂的光学系统的器件。在这个项目中，我们将首先研究相变(GeSbTe)和相变(VO2和SmNiO_3)材料中的离子-固体-相互作用，因为这些材料在从各自的金属相到绝缘相的相变过程中经历了巨大的光学对比度。为了控制相变，我们将系统地研究这些材料中的离子束参数对光学性质变化的依赖关系。其次，通过亚波长图案掩模或使用聚焦离子束的直接写入，利用离子束照射对这些材料进行选择性掺杂或缺陷工程，将设计出具有广泛可调光谱范围的亚表面。最后，由于离子辐照的选择性掺杂和缺陷工程可以实现固有的平坦亚表面，因此可以在项目结束时逐层构建三维分层系统：这是光学中的长期愿景。