Reactive co-sputtering thin film deposition system

要求提供资金，用于反应共溅射系统，用于沉积具有受控成分、相和结构的半导体薄膜和异质结构。该系统将安装在慕尼黑工业大学（TUM）的Walter Schottky研究所，并将补充现有的沉积能力，目前不包括反应共溅射。该系统将成为Pl研究的关键工具，致力于开发氧化物，氮化物和氮氧化物基材料，并将其应用于将阳光转化为可再生燃料。PI是TUM的新教员，并设想通过这种能力提交多个新的研究提案。初步研究项目将包括以下内容：i）沉积作为模型系统的取向和/或异质外延过渡金属氧化物半导体光电极，其将用于载流子传输、（光）腐蚀和复合机制的研究，ii）沉积具有接近最佳带隙的钙钛矿氮氧化物半导体用于太阳能收集，和iii）沉积和开发用于太阳能燃料形成的基于Cu基氮化物的新型p型半导体光电阴极。PI在反应共溅射沉积技术方面拥有丰富的经验，该技术经过专门选择，可对成分、相和结构进行独特的控制，同时还可提供多功能性，以相对适中的时间和资源投资探索新材料。

Funding is requested for a reactive co-sputtering system for deposition of semiconductor thin films and heterostructures with controlled composition, phase, and structure. The system will be installed at the Walter Schottky Institute, Technical University of Munich (TUM), and will complement existing deposition capabilities, which do not currently include reactive co-sputtering. The system will be a key tool in the Pl's research dedicated to the development of oxide, nitride, and oxynitride-based materials with application for conversion of sunlight into renewable fuels. The PI is a new faculty member at TUM and envisions the submission of multiple new research proposals enabled by this capability. Initial research projects will include the following : i) deposition of oriented and/or heteroepitaxial transition metal oxide semiconductor photoelectrodes as model systems that will be used for studies of carrier transport, (photo)corrosion, and recombination mechanisms, ii) deposition of perovskite oxynitride semiconductors with near optimal bandgaps for solar energy harvesting, and iii) deposition and development of novel p-type semiconductor photocathodes based on Cu-based nitrides for solar fuel formation. The PI has extensive experience with the reactive co-sputtering deposition technique, which has been specifically chosen to provide unique control over composition, phase, and structure, while also providing versatility to explore new materials with comparatively moderate time and resource investments.