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MEMSセンサを用いた極微量液体の熱伝導率・熱拡散率の測定法に関する研究

利用MEMS传感器测量超痕量液体导热系数和热扩散系数的方法研究

基本信息

批准号：
20656039
负责人：
高松洋
金额：
$ 1.73万
依托单位：
Kyushu University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Exploratory Research
财政年份：
2008
资助国家：
日本
起止时间：
2008 至无数据
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-20656039/
关键词：
熱伝導率熱物性新測定法定常法 MEMSセンサ微量サンプル液体

项目摘要

液体試料の熱伝導率測定には,通常,最低でも数十ml程度の試料を必要とする.そこで,本研究では,シリコン基板上に作製したビーム(梁)型MEMSセンサを用いて1μl未満の極微量試料の熱伝導率を測定する方法について検討を行った.一様に発熱するセンサおよびそのまわりの液体試料の熱伝導解析を行い,以下の結果を得た.1)温度場には定常状態が存在し,センサの長さが短いほど早く定常に到達する.定常に達する時間は,センサの厚さが50nm,長さが10μmの場合にはわずか100μs程度である,したがって,自然対流の影響を受けずに定常熱伝導状態が得られる.2)定常状態でのセンサの平均温度上昇は試料の熱伝導率が高いほど低くなる,なお,その温度上昇の熱伝導率への依存性はセンサが長いほど大きい.3)したがって,本研究で考案したマイクロビームセンサを用いて,加熱開始直後に定常状態に達したセンサ温度を測定すれば,極微量液体試料の熱伝導率を決定できる.4)厚さ50nm,長さ10μmのセンサを想定し,センサの温度上昇を3K程度と仮定すると,印加電圧と電流はそれぞれ最低でも18mVおよび0.1mA程度であり,いずれも十分制御・測定可能である.5)熱伝導率の測定精度は,2.5〜4.4%程度と予想される.6)温度浸透厚さは試料の熱伝導率には依存せず,センサの長さとほぼ等しいので,それと同程度の深さの溝を作製するのが望ましい.以上のように,新しい方法による熱伝導率測定が可能なことが解析により明らかになった.また,白金薄膜の蒸着,電子線描画,ウェットエッチングなど,センサの作製手順を考案するとともに,そのいくつかのプロセスの運転条件を確立した.

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