Basic research on the shape memory alloy thin films

形状记忆合金薄膜的基础研究

• 批准号: 05452272
• 负责人: MIYAZAKI Shuichi
• 金额: $ 3.65万
• 依托单位: University of Tsukuba
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05452272/
• 关键词: Micromachine; Shape memory alloy; Ti-Ni; Microactuator; Martensitic transformation; Thin film

Among several types of performance materials proposed for fabricating microactuators to power micromachines, Ti-Ni shape memory alloy thin films have great advantages such as large deformation and recovery force ; besides, even an intrinsic disadvantage of the shape memory alloy such as a slow response due to the limitation of cooling rate can be greatly improved in thin films. Therefore, the development of Ti-Ni shape memory alloy thin films has been keenly demanded. The present project has been successful in developing a perfect shape memory effect in sputter-deposited Ti-Ni thin films. The transformation temperatures and shape memory characteristics were found to be strongly affected by heat-treatment, alloy composition and sputtering condition. The shape change and recovery force associated with the martensitic transformation in Ti-Ni thin films reached up to 6% and 500Mpa, respectively, which were equivalent to those of bulk specimens.Ti-Ni-Cu and Ti-Ni-Pd ternary shape memory alloy thin films were also made by sputtering. They showed a small temperature hysteresis and high transformation temperatures, respectively ; these characteristics are effective to achieve a high response actuator characteristic. The Ti-Ni-Pd thin film showed a single stage transformation upon cooling and heating similarly to a Ti-Ni binary alloy thin films. Corresponding, they showed a single stage deformation both upon cooling and heating. The Ti-Ni-Cu thin film showed a two-stage transformation and hence a two-stage deformation ; the first stage corresponds to the transformation between B2 and O(Orthorhombic)-phase and the second stage between the O- and M-phases. The first stage transformation was accompanied by a small temperature hysteresis. All these thin films showed perfect shape memory effect.

在为微机械提供动力的微致动器所提出的几种性能材料中，Ti-Ni形状记忆合金薄膜具有很大的优点，例如大的变形和恢复力;此外，即使是形状记忆合金的固有缺点，例如由于冷却速率的限制而导致的响应缓慢，也可以在薄膜中得到极大的改善。因此，对Ti-Ni形状记忆合金薄膜的研究具有迫切的需求。本课题成功地在化学镀Ti-Ni薄膜中开发出了理想的形状记忆效应。合金成分、热处理工艺和溅射条件对合金的相变温度和形状记忆性能有很大影响。Ti-Ni薄膜马氏体相变的形变率和回复力分别达到6%和500 MPa，与块体材料相当。它们分别表现出小的温度滞后和高的转变温度;这些特性对于实现高响应致动器特性是有效的。Ti-Ni-Pd薄膜在冷却和加热时表现出与Ti-Ni二元合金薄膜相似的单阶段相变。相应地，它们在冷却和加热时都显示出单阶段变形。Ti-Ni-Cu薄膜表现出两个阶段的转变，因此两个阶段的变形;第一阶段对应于B2和O（正交）相之间的转变和O-和M-相之间的第二阶段。第一阶段的转变伴随着一个小的温度滞后。这些薄膜均表现出良好的形状记忆效应。

项目成果

S.Miyazaki他: "Shape Memory Characteristics of Sputter-deposited Ti-Ni Thin Films" Materials Transaction JIM. 34. 14-19 (1994)

S. Miyazaki 等人：“溅射沉积 Ti-Ni 薄膜的形状记忆特性”Materials Transaction JIM。34. 14-19 (1994)

K.Nomura他: "Transformation and Deformation Behavior of Sputter-deposited Ti-Ni Thin Films" Trans.Mater.Res.Soc.Jpn.18B. 1049-1052 (1994)

K. Nomura 等人：“溅射沉积 Ti-Ni 薄膜的转变和变形行为”Trans.Mater.Res.Soc.Jpn.18B (1994)。

S.Miyazaki他: "Effect of Heat Treatment on Deformation Behavior Associated with R-phase and Martensitic Transformations in Ti-Ni Thin Films" Trans.Mater.Res.Sco.Jpn.18B. 1041-1044 (1994)

S. Miyazaki 等人：“热处理对 Ti-Ni 薄膜中与 R 相和马氏体转变相关的变形行为的影响”Trans.Mater.Res.Sco.Jpn.18B (1994)。

M.Satoh, A.Ishida, A.Takei and S.Miyazaki: "Effect of Thermal Cycling on the Transformation Temperatures of Ti-Ni Shape Memory Alloy Thin Films" Surface Technology. 45. 1308-1309 (1994)

M.Satoh、A.Ishida、A.Takei 和 S.Miyazaki：“热循环对钛镍形状记忆合金薄膜转变温度的影响”表面技术。

S.Miyazaki 他: "Shape Memory Characteristics of Sputter-deposited Ti-Ni-base Thin Films" Proc.of 1995 North American Conf.on Smart Strict.and Materials.(印刷中). (1995)

S. Miyazaki 等人：“溅射沉积钛镍基薄膜的形状记忆特性”Proc.of 1995 North American Conf.on Smart Strict.and Materials（正在出版）。