Development of Microactuators Possessing High Power and Large Actuation Utilizing Ti-Ni Sputter-deposited Shape Memory Alloy Films

利用Ti-Ni溅射沉积形状记忆合金薄膜开发具有高功率和大驱动力的微执行器

• 批准号: 14205099
• 负责人: MIYAZAKI Shuichi
• 金额: $ 35.44万
• 依托单位: University of Tsukuba
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14205099/
• 关键词: shape memory effect; shape memory alloy; Ti-Ni; Ti-Ni-Pd; Ti-Ni-Cu; sputtering; microactuator; martensitic transformation; スパッタ薄膜; Ni-Ti; 微細加工; 形状記憶効果

Ti-Ni shape memory alloy thin films are expected to be applied for microactuators due to the great advantages such as large shape recovery force and strain. In this research, Ti-Ni thin films were deposited on Si substrates with SiO2 surface by using the radio frequency magnetron sputtering method. Diaphragm microactuators were fabricated by applying the Si photoetching method, and heat-treatment was carried out in order to acquire shape memory effects. The shape of the diaphragm was square with the width of 560 micron meters. The Ti-Ni diaphragm was convex in the martensite phase and flat in the parent phase : the shape change occurred repeatedly by cooling and heating. In order to evaluate the dynamic motion of the diaphragm microactuator, a three-dimensional shape analysis was performed with varying experimental parameters such as frequency and current. It was found that the displacement of the Ti-Ni binary alloy microactuator was changed by changing the current and/or the frequency … More .A Ti-Ni microactuator revealed an effective cyclic response below a cyclic frequency of several tens Hz. In order to improve the cyclic response, Pd was added to make Ti-Ni-Pd thin films for microactuators, because Pd addition increases the Ms temperature so that a higher cooling rate can be expected at a higher temperature. The maximum Ms temperature of the Ti-Ni was 340K, while that of the Ti-Ni-Pd was 420K which is 80K higher than that of the binary alloy. A Ti-Ni-Pd microactuator revealed effective actuation at 80 Hz. Cu was also added to make Ti-Ni-Cu thin films, which posses a narrower transformation temperature hysteresis and a smaller transformation strain when compared with those of the Ti-Ni films : the hysteresis of the former is only one third of that of the latter. An effective actuation was observed in the Ti-Ni-Cu microactuator even at 100 Hz. A narrow transformation temperature hysteresis can be also expected by using the R-phase transformation. A Ti-Ni microactuator showed an effective motion even at 125 Hz. With the results mentioned above, high speed and powerful microactuators can be fabricated for variety of purposes in the near future. Less

Ti-Ni形状记忆合金薄膜具有形状恢复力大、应变大等优点，有望应用于微执行器。本文采用射频磁控溅射法在表面为SiO2的Si衬底上制备了Ti-Ni薄膜。采用硅光刻法制作了膜片式微执行器，并进行了热处理以获得形状记忆效应。膜片的形状为正方形，宽度为560微米。Ti-Ni膜片在马氏体相中呈凸状，在母相中呈扁平状，在冷却和加热过程中反复发生形状变化。为了评估膜片微致动器的动态运动，进行了三维形状分析与不同的实验参数，如频率和电流。实验结果表明，通过改变电流和/或频率，可以改变Ti-Ni二元合金微驱动器的位移 ...更多信息 Ti-Ni微致动器显示出低于几十Hz的循环频率的有效循环响应。为了改善循环响应，添加Pd以制造用于微致动器的Ti-Ni-Pd薄膜，因为Pd的添加增加了Ms温度，使得可以在较高温度下预期较高的冷却速率。Ti-Ni合金的最高Ms温度为340 K，而Ti-Ni-Pd合金的最高Ms温度为420 K，比二元合金的最高Ms温度高80 K。Ti-Ni-Pd微致动器在80 Hz下显示出有效的致动。另外，还添加了Cu元素制备了Ti-Ni-Cu薄膜，与Ti-Ni薄膜相比，Ti-Ni-Cu薄膜具有更窄的相变温度滞后和更小的相变应变，前者的相变温度滞后仅为后者的三分之一。在Ti-Ni-Cu微致动器中，即使在100 Hz下也观察到有效的致动。通过使用R相变，也可以预期窄的相变温度滞后。Ti-Ni微致动器在125 Hz下也能有效地运动。利用上述结果，在不久的将来，可以制造出各种用途的高速和强大的微致动器。少

项目成果

Characterization of High-Speed Microactuator Utilizing Shape Memory Alloy Thin Films

• DOI: 10.4028/www.scientific.net/msf.475-479.2037
• 发表时间: 2005-01
• 期刊: Materials Science Forum
• 作者: M. Tomozawa;K. Okutsu;H. Y. Kim;S. Miyazaki

H.Hosoda et al.: "Hardness and Aging of Ni-Mu-Ga Flerromagnetic Shape Memory Alloys"Materials Transactions. 43. 852-855 (2002)

H.Hosoda 等人：“Ni-Mu-Ga 铁磁性形状记忆合金的硬度和老化”材料交易。

形状記憶合金薄膜マイクロアクチュエータ

形状记忆合金薄膜微执行器

• 发表时间: 2003
• 期刊: 未来材料 3
• 作者: Yamori Keiji;Kawamura Hiroshi Tani Akinori;Takizawa Atsushi;宮崎修一
• 通讯作者: 宮崎修一

J.I.Kim, S.Miyazaki: "Effect of Low Temperature Aging on the R-phase Transformation of a Ti-50,9at%Ni Allog"Materials Science Forum. 394-395. 225-228 (2002)

J.I.Kim,%20S.宫崎:%20"效果%20of%20Low%20温度%20老化%20on%20the%20R相%20转变%20of%20a%20Ti-50,9at%Ni%20Allog"材料%20科学%20论坛

S.Miyazaki et al.: "Dynamic Characteristics of Diaphragm Microactuators Utilizing Sputter-deposited TiNi Shape Memory Alloy Tin Films"Materials Science Forum. 394-395. 467-474 (2002)

S.Miyazaki 等人：“利用溅射沉积 TiNi 形状记忆合金锡膜的膜片微执行器的动态特性”材料科学论坛。