Fabrication of Microactuators Utilizing Sputter-deposited Ti-Ni Shape Alloy Thin Films

在Si衬底上制备了Ti-Ni形状记忆合金薄膜。它们的形状记忆和他们的转变特性进行了测量。使用Ti-Ni靶。通过大范围改变热处理温度和时间进行形状记忆，研究热处理条件对相变特性的影响。热处理温度越高，相变温度越高。在硅基片上镀上Ti-Ni薄膜，进行微机械加工，制作微驱动器结构。驱动器由2.0 μ m厚的Ti-Ni薄膜和1.0 μ m厚的SiO_2薄膜组成。在加热和冷却过程中，通过使用|Azer Beam技术致动器在冷却时达到几十微米，并且在加热时变得平坦，并且通过随后的热循环重复运动。M是340 K，而A是360 K。它们远高于室温，因此由于良好的冷却，实现了50 Hz的响应。制备了各种尺寸的致动器，并测量了它们的致动器特性，尺寸范围在100和1400微米之间。驱动距离与驱动器尺寸线性相关。这意味着通过利用这些致动器，各种应用将是可能的。

Ti-Ni shape memory alloy thin films have been made on Si substrates. They were shape memorized and their transformation characteristics were measured. A Ti-Ni target was used. Shape memorization was conducted by widely varying heat-treatment temperature and time in order to investigate the effect of heat-treatment condition on the transformation characteristics. The transforamtion temperatures increased eith increasing heat-treatment temperature.Si substartes coated by a Ti-Ni film were.micromachined to fabricate microactuator structures. The actuator is composed of a 2.0 micrometer thick Ti-Ni film and a 1.0 micrometer thick SiO_2 film. The hight of the actuators was measured during heating and cooling by using a |azer beam technique. The actuator reached several tens micrometer upon cooling and became flat upon heating, and the movement was repeated by following thermal cycling. The Ms was 340 K, while the As was 360 K. They are well above the room temperature so that a 50 Hz response was achieved due to a good coolingjate. Variety of sizes of actuators were prepared and their actuator characteristics were measured, the size beins ranged between 100 and 1400 micrometers. The actuation distance was linealy corelated with the actuator size. This means that variety of applications will be possible by utilizing these actuators.