微小重力下における界面張力差駆動対流の機構とその制御に関する研究

微重力下界面张力差驱动对流机理及控制研究

• 批准号: 06650866
• 负责人: HIRATA Akira
• 金额: $ 1.54万
• 依托单位: Waseda University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-06650866/
• 关键词: Marangoni Convection; Surface Tension Driven Convection; micro-gravity condition; Crystal Growth; Floating Zone Method; Horizontal Bridgeman Method; Drop Tawer; Transport Phenomena; フローティングゾーン法(FZ法); 微小重力; 単結晶; 融液成長; 自然対流; 数値解析; 半導体; 界面張力

To suggest new approaches for high quality material processing under micro-gravity condition, systems of surface tension driven convection (Marangoni convection) and its control, e.g. acceleration and deceleration, were studied.In this study, model experiments of Floating Zone Method and Horizontal Bridgeman Method (both two method were usually used on making semiconductor single crystals) were carried out to clarify momentum and heat transfer in laminar flow using model fluid and melt of semiconductor under normal gravity condition and micro-gravity condition utilized parabolic flight and drop shaft. Moreover experimental results were compared with two-dimensional steady numerical simulation.This study clarified effects of physical properties (Prandtl number), temperature difference, length of free surface, depth of melt and strength of magnetic field on surface tension driven convection, effects of gravity, length of free surface and shape of melt on critical condition between laminar and oscillatory flow, and effects of gravity, temperature difference, length of free surface and shape of melt on feature of velocity and temperature oscillation.Transport phenomena in a melt under micro-gravity conditions were clarified. Moreover under normal gravity condition, control of surface tension driven convection is going to make an new approach for high quality material processing possible.

为了提出微重力条件下高质量材料加工的新方法，研究了表面张力驱动对流（Marangoni对流）系统及其控制（如加速和减速）。本研究采用半导体单晶制造中常用的两种方法——浮区法和水平Bridgeman法进行模型实验，利用模型流体和半导体熔体在正常重力条件下和微重力条件下利用抛物飞行和落轴，阐明层流中的动量和传热。实验结果与二维稳态数值模拟结果进行了比较。本研究阐明了物理性质（普朗特数）、温差、自由面长度、熔体深度和磁场强度对表面张力驱动对流的影响，重力、自由面长度和熔体形状对层流和振荡流动临界条件的影响，重力、温差、自由面长度和熔体形状对速度和温度振荡特征的影响。阐明了微重力条件下熔体中的输运现象。此外，在正常重力条件下，控制表面张力驱动的对流将为高质量材料的加工提供新的途径。

项目成果

W.R.Hu.J.Z.Shu,Y.L.Yno,J.C.Xe.Z.M Tone A Hirata S.Nishizawa and M.Sakurai: "Drop Shaft Experiment of Thermocapillary Oscillatory Convection" Proc.2nd Japan-China Warkshop on Microgravity Science. 121-128 (1994)

W.R.Hu.J.Z.Shu,Y.L.Yno,J.C.Xe.Z.M Tone A Hirata S.Nishizawa 和 M.Sakurai：“热毛细管振荡对流的落轴实验”Proc.第二届日中微重力科学研讨会。

S.Nishizawa and A.Hirata: "Marangoni Convection Phenomena under Microgravity Conditions" Materia Japan. 33. 1015-1019 (1994)

S.Nishizawa 和 A.Hirata：“微重力条件下的马兰戈尼对流现象”Materia Japan。

A.Hirata and S.Nishizawa: "Marangoni Convection and Chemical Engneering in Space" Kagaku Kougaku. 59. 822-823 (1995)

A.Hirata 和 S.Nishizawa：“空间中的马兰戈尼对流和化学工程” Kagaku Kougaku。

J.Z.Shu, Y.L.Yao, J.C.Xie, Z.M.Tang, W.R.Hu, A.Hirata, S.Nishizawa and M.Sakurai: "Oscillatory Features in Marangoni Convection in a Half Floating Zone under Microgravity Drop Shaft Experiment" Proceedings of 3rd China-Japan Workshop on Microgravity Scien

J.Z.Shu、Y.L.Yao、J.C.Xie、Z.M.Tang、W.R.Hu、A.Hirata、S.Nishizawa、M.Sakurai：“微重力落轴实验下半浮区马兰戈尼对流的振荡特征”第三届中日会议论文集

K.Okitsu, Y.Hayakawa, T.Yamaguchi, M.Kumagawa, Y.Okano, S.Sakai, A.Hirata, S.Nishizawa, S.Fujiwara, N.Imaishi, S.Yoda and T.Oida: "Experiment for Mixing of In-GaSb-Sb under MIcro-Gravity" 12th ISAS Space Utilization Symposium. 243-246 (1995)

K.Okitsu、Y.Hayakawa、T.Yamaguchi、M.Kumakawa、Y.Okano、S.Sakai、A.Hirata、S.Nishizawa、S.Fujiwara、N.Imaishi、S.Yoda 和 T.Oida：“实验