atomic and molecular manipulation and fabrication of nano-strucure using atomic force microscopy

本研究的目的是发展原子力显微镜的原子和分子操作方法。本研究主要存在两个问题；(1)高灵敏度力检测；(2)利用作用于尖端和表面之间的原子力进行原子和分子操纵的机理和条件研究。本研究的主要成果如下：(1)垂直原子操纵的机理和条件明确了垂直原子分子操纵机械去除和沉积表面原子分子的机理和条件。在这里，我们使用Si（111）表面作为样本表面。测量参数为振荡悬臂梁的振幅、频移和试样的温度。(2)修饰尖端垂直原子操纵的可控因素修饰尖端易于改变尖端的电子态。通过改进的尖端，我们进一步研究了垂直原子操纵的机制，以机械地去除和沉积原子在表面上。(3)原子横向操纵的机制和条件我们进一步研究了原子横向操纵在表面机械滑动的机制和条件。在这里，我们使用了表面能较小的离子晶体CaF_2。

The objective of the present research is to develop the atomic and molecular manipulation method using atomic force microscopy. There are mainly two problems in this research ; (1)High sensitive force detection, (2)Investigation of the mechanism and condition on atomic and molecular manipulation using the atomic force acting between tip and surface.The main results of this research are as follows :(1)Mechanism and condition of vertical atomic manipulationWe clarified the mechanism and condition of vertical atomic and molecular manipulation to mechanically remove and deposit the atom and molecule on the surface. Here, we used the Si(111) surface as a sample surface. The measurement parameters were vibration amplitude of the oscillating cantilever, frequency shift and temperature of the sample.(2)Controllable factors of vertical atomic manipulation using modified tipThe electronic state of the tip apex was easily changed by modifying the tip apex. By using the modified tip, we further investigated the mechanism of vertical atomic manipulation to mechanically remove and deposit the atom on the surface.(3)Mechanism and condition of lateral atomic manipulationWe further investigated the mechanism and condition of lateral atomic manipulation to mechanically slide the atom on the surface. Here, we used the ionic crystal CaF_2 surface with small surface energy.