Development of standardization for nanoindentation tests

纳米压痕是评价薄膜力学性能的一种简单有效的方法。在这种情况下，纳米压痕测试仪已经开发和商业化的几个制造商。在这项研究中，我们使用不同设计的测试仪和建立的方法来评估标准样品的纳米压痕数据的绝对评估。该方法只需要两个校正因子；一个是测试器的框架柔度Cf，另一个是对原始表面的检测误差，其中包括压头尖端的截断和压头预压引起的表面损坏。后一种校正是通过在测量的穿透深度h上增加一个校正长度□hC来进行的。我们发现□hC值随着材料硬度的降低而增加，并且对测试仪的性能非常敏感。

Nanoindentation is a simple and effective means for evaluating the mechanical properties of thin films. In such circumstances, nanoindentation testers have been developed and commercialized by several manufactories. In this study, we evaluated the standard specimens using different designed testers and established methods to absolute evaluations for nanoindentation data. The method requires only two correction factors ; one is a frame compliance, Cf, of the testers, and the other is an error of the detection of the original surface which includes both the truncation of the indenter tip and the damage of the surface caused by the preloading of the indenter. The latter correction is conducted by adding a correction length, □hC, to the measured penetration depth, h. It was found that values □hC increase with decrease in the hardness if material and are very sensitive to the performance of the testers.