Development of Prediction Method for Metal Line Failure Induced by High Current Density

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1. In order to simulate the failure process in polycrystalline line, slit-like elements were allocated in the mesh generation. The thickness of only the slit-like element was decreased based on the calculated value of the governing parameter for electromigration damage. Thus, a method of numerical simulation of the failure process was developed for the prediction of lifetime and failure site in polycrystalline lines.2. The lifetime and failure location of angled polycrystalline lines were predicted. The lines treated were different in film characteristics and line shape. On the other hand, experiment was performed with the same line shape, film characteristics and operating condition as those in the prediction. Good agreement between the predictions and the experimental results was obtained for the lifetime and the failure location. The usefulness of the prediction method for polycrystalline line failure was verified experimentally.3. By atomic force microscopic observation of failure process in bamboo lines, it was found that voids in bamboo lines appeared in the form like a shallow depression, not like a slit, and that the voids grew with shaving the surface of the void.4. A method of numerical simulation of the failure process in bamboo lines was developed. In the simulation, the metal line was divided into elements without introducing slit-like elements. By changing the thickness of each element, the failure process was simulated numerically using the governing parameter for electromigration damage in bamboo lines.5. Lifetime and failure site of angled bamboo lines were predicted. On the other hand, experiment was performed with the same line shape and under the same operating condition as those in the prediction. Good agreement between the predictions and the experimental results was obtained for the lifetime and the failure location. The usefulness of the prediction method for bamboo line failure was verified experimentally.