Evaluation Method for Metal Line Failure Induced by High Current Density in Order to Ensure ULSI Reliability

高电流密度引起的金属线路故障评估方法以确保ULSI可靠性

基本信息

  • 批准号:
    15560058
  • 负责人:
  • 金额:
    $ 2.11万
  • 依托单位:
  • 依托单位国家:
    日本
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
  • 财政年份:
    2003
  • 资助国家:
    日本
  • 起止时间:
    2003 至 2004
  • 项目状态:
    已结题

项目摘要

1.The parameter governing electromigration damage in the passivated bamboo line was newly formulated by adding the effect of stress on atomic diffusion to the governing parameter which has already been developed for unpassivated line. Using the parameter the simple and accurate method for derivation of film characteristic constants was developed.2.Acceleration ration tests of electromigration damage were performed where high-density electric current was supplied to the passivated aluminum bamboo line of submicron width for a certain period of time. Inputting the obtained velocity into the derivation method utilizing the governing parameter described in item 1 the film characteristic constants were obtained and the constants were concluded to be valid. From this fact, the governing parameter for electromigration damage newly developed was verified.3.It is known that there is a threshold current density of the electromigration damage in the via-connected line. Utilizing the governing parameter for electromigration damage a numerical simulation of the building-up process of the atomic density distribution was developed and thus we achieved the construction of the evaluation method of the threshold current density. This method is applicable to not only straight shape line but also the two-dimensionally shaped line such as angled line.4.Concerning the straight lines, the evaluation result that the threshold was in inverse proportion to the line length was obtained, and regarding an angled line the evaluation result that threshold of the angled line was greater than that of straight line was obtained. From experimental results the same tendency was obtained as the evaluation results, and thus the evaluation method was verified. It was found out that two-dimensional shape of the line affected threshold current density, and valuable knowledge for ensuring ULSI reliability was obtained.
1.通过将应力对原子扩散的影响加入到已经为未钝化线开发的控制参数中,新制定了钝化竹线中的电迁移损伤的控制参数。利用该参数,建立了一种简便、准确的薄膜特性常数的推导方法。2.对亚微米级钝化铝竹线进行了一定时间的高密度电流作用下的电迁移损伤加速比试验。将获得的速度输入到利用第1项中描述的控制参数的推导方法中,获得了膜特性常数,并且该常数被认为是有效的。由此验证了新提出的电迁移损伤的控制参数。3.在通孔连接线中存在电迁移损伤的阈值电流密度。利用电迁移损伤的控制参量,对原子密度分布的建立过程进行了数值模拟,从而建立了阈值电流密度的评价方法。该方法不仅适用于直线,也适用于二维形状的直线,如折线。4.对于直线,得到了阈值与直线长度成反比的评价结果,对于折线,得到了阈值大于直线的评价结果。从实验结果中得到与评价结果相同的趋势,从而验证了评价方法。研究发现,线的二维形状对阈值电流密度有影响,为保证ULSI的可靠性提供了有价值的知识。

项目成果

期刊论文数量(86)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
保護膜厚さを考慮した集積回路配線の断線故障予測法
考虑保护膜厚度的集成电路布线断线故障预测方法
配線端部のドリフト速度計測に基づいた金属薄膜配線物性値の導出
基于布线末端漂移速度测量推导金属薄膜布线的物理特性
Film Characteristics Derived by the Governing Parameter for Electromigration Damage at Metal Line End
由金属线端部电迁移损伤控制参数得出的薄膜特性
Derivation of Film Characteristic Constants by Using Governing Parameter for Electromigration Damage in Passivated Bamboo Line
利用钝化竹线电迁移损伤控制参数推导薄膜特性常数
Effect of Line-Shape on Threshold Current Density of Electromigration Damage in Bamboo Lines
线形对竹线电迁移损伤阈值电流密度的影响
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SASAGAWA Kazuhiko其他文献

Demineralization characteristics of cortical bone under voltage application in phosphate-buffered saline
磷酸盐缓冲盐水中电压施加下皮质骨的脱矿特性
第15回放散虫研究集会NOM京都大会,
第 15 届放射虫研究会议 NOM 京都会议,
  • DOI:
  • 发表时间:
    2022
  • 期刊:
  • 影响因子:
    0
  • 作者:
    OSANAI Keita;FUJISAKI Kazuhiro;OTA Fuki;SASAGAWA Kazuhiko;MORIWAKI Takeshi;漆山 凌・松岡 篤
  • 通讯作者:
    漆山 凌・松岡 篤
新潟県西部の下部ジュラ系来馬層群の砕屑物組成からみた後背地の復元
基于新泻县西部下侏罗统栗间组碎屑成分的腹地重建
  • DOI:
  • 发表时间:
    2022
  • 期刊:
  • 影响因子:
    0
  • 作者:
    OSANAI Keita;FUJISAKI Kazuhiro;OTA Fuki;SASAGAWA Kazuhiko;MORIWAKI Takeshi;漆山 凌・松岡 篤;伊藤 剛・松岡 篤;川尻啄真・伊藤 剛・松岡 篤
  • 通讯作者:
    川尻啄真・伊藤 剛・松岡 篤

SASAGAWA Kazuhiko的其他文献

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{{ truncateString('SASAGAWA Kazuhiko', 18)}}的其他基金

Investigation of damage mechanism of metal nanoparticle interconnect used in flexible electronic circuits under electrical and mechanical loadings
柔性电子电路用金属纳米粒子互连在电气和机械负载下的损伤机制研究
  • 批准号:
    19K04084
  • 财政年份:
    2019
  • 资助金额:
    $ 2.11万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
ENHANCEMENT OF SPATIAL RESOLUTION OF THIN AND FLEXIBLE TACTILE SENSOR AND HIGH FUNCTIONALIZATION OF TOUCH PANEL
薄型柔性触觉传感器空间分辨率的增强以及触摸面板的高功能化
  • 批准号:
    16K12946
  • 财政年份:
    2016
  • 资助金额:
    $ 2.11万
  • 项目类别:
    Grant-in-Aid for Challenging Exploratory Research
IDENTIFICATION OF GOVERNING PARAMETER AND RELIABILITY EVALUATION FOR CARBON-NANOTUBE DAMAGE UNDER HI-DENSITY ELECTRONIC CURRENT
高密度电流下碳纳米管损伤控制参数识别及可靠性评估
  • 批准号:
    25420002
  • 财政年份:
    2013
  • 资助金额:
    $ 2.11万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
DEVELOPMENT OF HAPTIC DISPLAY ATTACHABLE TO HUMAN SKIN USING FABRIC ACTUATOR
使用织物致动器开发可附着在人体皮肤上的触觉显示器
  • 批准号:
    23650344
  • 财政年份:
    2011
  • 资助金额:
    $ 2.11万
  • 项目类别:
    Grant-in-Aid for Challenging Exploratory Research
INVESTIGATION OF DAMAGE MECHANISM AND ESTIMATION OF STRENGTH OF CARBON NANOTUBES AS ELECTRONIC MATERIAL UNDER HIGH-DENSITY ELECTRONIC CURRENT
高密度电流作用下碳纳米管电子材料损伤机制研究及强度评估
  • 批准号:
    21360046
  • 财政年份:
    2009
  • 资助金额:
    $ 2.11万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Development of Prediction Method for Metal Line Failure Induced by High Current Density
高电流密度金属线路故障预测方法的开发
  • 批准号:
    11555024
  • 财政年份:
    1999
  • 资助金额:
    $ 2.11万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B).

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Effect of electromigration on corrosion and mass transfer in high-temperature liquid metals
电迁移对高温液态金属腐蚀和传质的影响
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SHF:Small: Learning-based Fast Analysis and Fixing for Electromigration Damage
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电迁移设计:可靠金属化和最佳运行建模
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