Development of Direct Patterning for Ceramics Films by Soft Solution Processing

软溶液加工陶瓷薄膜直接图案化的发展

• 批准号: 13450268
• 负责人: YOSHIMURA Masahiro
• 金额: $ 9.6万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13450268/
• 关键词: soft solution process; solution process; pattening; ceramics; thin film; BaTiO_3; LaCoO_2; CdS; LiCoO_2; BaTiO_3

We have developed new direct patterning methods by interface-activated reactions using an aqueous solution as follows :(1) A laser patterning system was designed and constructed to activate quite narrow area by laser irradiation on the target substrate for on-site fabrication. The laser irradiated point on substrate is heated immediately, thus it can be activated as a micro-autoclave for hydrothermal reaction. This patterning system enabled to fabricate directly crystallized BaTiO_3, SrTiO_3 and TiO_2 thin films pattern, less than 10 micrometer in diameter, on various substrates in solutions.(2) An ink-jet patterning system was designed and constructed to draw pattern on the substrate. Using this ink-jet patterning system, the crystallized CdS and PbS patterns has been fabricated by reaction between deferent solutions on the substrate.(3) The direct patterning of carbon film on silicon substrate has been done by applying high voltage between silicon substrate in ethanol. The prepared carbon pattern has been investigated by Raman scattering to demonstrate that the pattern consisted of diamond like carbon.

我们已经开发了新的直接图案化方法，通过界面激活反应使用水溶液如下：（1）激光图案化系统的设计和构建，通过激光照射在目标基板上的现场制造激活相当窄的区域。激光照射在基片上的点立即被加热，因此它可以被激活为一个微型高压釜进行水热反应。该图形化系统可以在溶液中在各种衬底上直接制备出直径小于10 μ m的BaTiO_3、SrTiO_3和TiO_2薄膜图形。(2)设计并构建了一套喷墨图案化系统，用于在基底上绘制图案。利用该系统，通过不同溶液之间的反应，在衬底上形成了CdS和PbS的结晶图形。(3)在乙醇介质中，通过在硅衬底之间施加高压，在硅衬底上直接构图碳膜。通过拉曼散射研究了所制备的碳图案，以证明该图案由类金刚石碳组成。

项目成果

Ryo TERANISHI: "Direct Fabrication of Patterned PbS and CdS on Organic Sheets at Ambient Temperature by On-site Reaction Using Ink Jet Printer"Solid State Ionics (Special Issues of SSP-2000). 151. 97-103 (2002)

Ryo TERANISHI：“在环境温度下通过使用喷墨打印机现场反应在有机片材上直接制造图案化的 PbS 和 CdS”固态离子学（SSP-2000 特刊）。

Masahiro Yoshimura: "Soft, Solution Processing: Environmentally Benigh Direct Fabrication of Shaped Ceramics (Nano-Crystals, Whiskers, Films, and/or Patterns) without Firing"Key Engineering Materils(Proc. of Euro Ceram. Soc., VII). 206-213. XV-XX (2001)

Masahiro Yoshimura：“软解决方案加工：无需烧制即可环境友好地直接制造成型陶瓷（纳米晶体、晶须、薄膜和/或图案）”关键工程材料（Proc. of Euro Ceram. Soc.，VII）。

Takeshi FUJIWARA: "Direct Fabrication of Crystallized LiCoO2 Films on Paper by Artificial Biomineralization with Electrochemically Activated Interfacial Reactions"Chemical Physics Letters. 365. 369-373 (2002)

Takeshi FUJIWARA：“通过电化学激活界面反应人工生物矿化在纸上直接制备结晶 LiCoO2 薄膜”化学物理快报。

Tomoaki Watanabe: "Direct Fabrication of Crystalline Vanadates Films by Hydrothermal-Electrochemical Method"Solid State Sciences. 3[1-2]. 183-188 (2001)

Tomoaki Watanabe：“通过水热电化学法直接制备结晶钒酸盐薄膜”固态科学。

Masahiro YOSHIMURA: "Direct Fabrication of Patterned Functional Ceramics Film by Soft Solution Processing without Post-Firing"MRS Proceeding (Fall, 2002). (2003)

Masahiro YOSHIMURA：“通过软溶液处理直接制造图案化功能陶瓷薄膜，无需进行后烧制”MRS 论文集（2002 年秋季）。