Development of Direct Patterning for Ceramics Films by Soft Solution Processing

我们利用水溶液的界面活化反应开发了新的直接图案化方法，具体如下：(1)设计并构建了一套激光图案化系统，通过激光照射靶衬底来激活相当窄的区域，用于现场制作。激光照射在衬底上的点被立即加热，从而可以作为微型高压灭菌器进行水热反应。该图案化系统可以在溶液中直接在不同的衬底上制备出直径小于10微米的BaTiO_3、SrTiO_3和TiO_2薄膜图案。(2)设计并搭建了喷墨图案化系统，用于在衬底上绘制图案。利用该喷墨图案化系统，通过不同溶液在衬底上的反应，制备了结晶的硫化镉和硫化铅图案。(3)在乙醇中，通过在硅衬底之间施加高压，在硅衬底上实现了碳膜的直接图案化。用拉曼散射研究了所制备的碳图案，证明该图案是由类金刚石碳组成的。

We have developed new direct patterning methods by interface-activated reactions using an aqueous solution as follows :(1) A laser patterning system was designed and constructed to activate quite narrow area by laser irradiation on the target substrate for on-site fabrication. The laser irradiated point on substrate is heated immediately, thus it can be activated as a micro-autoclave for hydrothermal reaction. This patterning system enabled to fabricate directly crystallized BaTiO_3, SrTiO_3 and TiO_2 thin films pattern, less than 10 micrometer in diameter, on various substrates in solutions.(2) An ink-jet patterning system was designed and constructed to draw pattern on the substrate. Using this ink-jet patterning system, the crystallized CdS and PbS patterns has been fabricated by reaction between deferent solutions on the substrate.(3) The direct patterning of carbon film on silicon substrate has been done by applying high voltage between silicon substrate in ethanol. The prepared carbon pattern has been investigated by Raman scattering to demonstrate that the pattern consisted of diamond like carbon.