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DEVELOPMENT OF UV ACTIVE AMORPHOUS TIO2 THIN FILMS AND APPLICATION TO ENVIRONMENTAL SENSOR

紫外活性非晶二氧化钛薄膜的研制及其在环境传感器中的应用

基本信息

批准号：
15560312
负责人：
HATANAKA Yoshinori
金额：
$ 2.3万
依托单位：
AICHI UNIVERSITY OF TECHNOLOGY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15560312/
关键词：
Environmental Material TiO2 Plasma CVD photo-catalytic material Hydrophilic function Oxygen sensor titanium tetra-isoropoxide Coating technology 酸化チタン TiO2 浄化作用環境材料

项目摘要

Titanium oxide films prepared by a remote plasma enhanced (RPE) CVD are in amorphous state and show high sensitive photo-conduction for UV radiation and excellent wet ability. These films contain a lot of OH groups in its film. These are attributed to the compensation of the defect states by OH groups included. In this study, it is also shown that the responses of the photo-conductive current are very slow with time constant of over 10 minutes. When the light was removed, the photocurrent continued to flow for long time with several hour time constants. These mean that photo-excited carriers could not recombine with the excited holes or electrons and iterated capture and emission between conduction band and capture states. Furthermore, photo-current is drastically influenced by the environmental gas, especially oxygen gas. In the environmental gas including oxygen, photocurrent decreases with reverse proportional relation for oxygen partial pressure. It is shown from considering the life time of the photo-excited carriers, these surface reactions of the film between environmental gasses and film surface are well suggested as to be an linear reaction. An application target for these materials has been suggested to be effective for an environmental oxygen gas sensor and coating materials for plastics.

采用远程等离子体增强（RPE） CVD法制备的氧化钛薄膜呈无定形，对紫外辐射具有较高的光导敏感性和良好的湿性。这些薄膜中含有很多OH基团。这是由于所含OH基团对缺陷状态的补偿。本研究还表明，光导电流的响应非常缓慢，时间常数在10分钟以上。当光被移除时，光电流以几个小时的时间常数持续流动很长时间。这意味着光激发载流子不能与被激发的空穴或电子复合，并且在导带和捕获态之间反复捕获和发射。此外，光电流受环境气体，特别是氧气的影响很大。在含氧环境气体中，光电流随氧分压的增加呈反比关系减小。结果表明，考虑光激发载流子的寿命，环境气体与膜表面之间的这些表面反应是线性反应。这些材料的应用目标是有效的环境氧气传感器和塑料涂层材料。