REVELATION OF LIGHT ACTIVE FUNCTION IN AMORPHOUS TiO3 THIN FILM

研制了一种用于产生高密度等离子体自由基的空心阴极喷射等离子体源。利用该等离子体源，以有机钛(四异丙醇钛：TTIP)为原料制备了非晶态二氧化钛薄膜。研究发现，由于薄膜中含有的OH碱终止了未成对的电子，使缺陷消失，所以得到的薄膜对紫外光有激活作用。研究还发现，这些薄膜对紫外光有很高的光电导性，对环境气体具有很高的暗电流敏感度，即对氧很低，对氢很高。为气敏传感器的应用研究了这些特性。

A hollow-cathode jet plasma source has been developed for the generation of high density plasma radicals. By using this plasma source, amorphous TiO2 thin films are deposited from organic-titanium (titanium tetra-isopropoxide: TTIP). It has been found that the films obtained have an active function for ultra-violet light, because OH bases included in the film terminate the unpaired electron and make the defects disappeared. It has been also found that these films have high photoconductivity for ultra-violet light and sensitive in dark current for the kind of environment gas, that is, very low for oxygen and high for hydrogen. These characteristics have been investigated for the application of gas sensor.