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Study on high frequency discharge containing oxygen at atmospheric pressure

常压含氧高频放电研究

基本信息

批准号：
16560242
负责人：
KIMURA Takashi
金额：
$ 1.92万
依托单位：
Nagoya Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2004
资助国家：
日本
起止时间：
2004 至 2005
项目状态：
已结题

项目摘要

Ozone production efficiency of a planar-disk-type barrier discharge of oxygen using a time-modulated power supply was first investigated. The efficiency obtained using the time-modulated power supply, which was a decreasing function of power injected into the discharge, was higher than that obtained using a C.W. power supply. The optimum on-time required in order to obtain the maximum efficiency corresponded to one period of the sinusoidal voltage, while an off-time of the power supply longer than 10-15 ms was required.Second, electrical and optical measurements on capacitively-coupled radio frequency (13.56 MHz) He/O_2 discharges at atmospheric pressure were carried out. The addition of oxygen to the He discharges varied from 0% to 5%. A distinct change in the dependence of the dissipated power on discharge voltage can be induced in any conditions. The intensity of the 845 nm line emitted from excited oxygen atoms, which was normalized by the intensity of the 750.4 nm line emitted from excited Ar and the ratio of the ground state Ar density to the total density of neutral species, was investigated as a function of the dissipated power, whereas the ozone concentration was detected by the optical absorption at 254 nm. The normalized intensity was approximately proportional to the dissipated power, whereas the ozone density decreased as the power increased. The ozone production in the capacitively coupled RF He/O_2 discharges was compared with that in He/O_2 barrier discharges in order to research the possibility of the RF He/O_2 discharges as the ozone generator. Although the ozone formation efficiency in the RF discharges was lower than that in the barrier discharges, the formation efficiency obtained using a time-modulated RF power supply was drastically improved and its value increased from about 4g/kWh to about 80g/kWh.

首次研究了采用时间调制电源的平面圆盘型氧气阻挡放电的臭氧产生效率。使用时间调制电源获得的效率是注入放电的功率的递减函数，高于使用C. W.电源获得最大效率所需的最佳导通时间对应于一个正弦电压周期，而电源的关断时间需要大于10-15 ms。其次，对大气压下13.56MHz的He/O_2容性耦合射频放电进行了电学和光学测量。氧的添加到He放电从0%到5%变化。在任何条件下，放电电压的耗散功率的依赖性可以引起一个明显的变化。从激发态氧原子发射的845 nm线的强度，这是由从激发态Ar发射的750.4 nm线的强度和基态Ar密度与中性物种的总密度的比率归一化，作为耗散功率的函数进行了研究，而臭氧浓度通过在254 nm处的光吸收检测。归一化强度与耗散功率近似成正比，而臭氧浓度随着功率的增加而减小。为了研究射频He/O_2放电作为臭氧发生器的可能性，对射频He/O_2放电中的臭氧产生量与阻挡放电中的臭氧产生量进行了比较。虽然RF放电中的臭氧形成效率低于阻挡放电中的臭氧形成效率，但是使用时间调制RF电源获得的臭氧形成效率显著提高，并且其值从约4g/kWh增加到约80 g/kWh。