In-Process Measuring System for U1tra-Precision Diamond Turned Surface

超精密金刚石车削表面在线测量系统

• 批准号: 01850028
• 负责人: MIYOSHI Takashi
• 金额: $ 2.62万
• 依托单位: Hokkaido University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B).
• 财政年份: 1989
• 资助国家: 日本
• 起止时间: 1989 至 1990
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-01850028/
• 关键词: In-process measurement; Ultra-precision; Diamond turning; Non-contact measurement; Ultra-fine surface; Fraunhofer diffraction; Optical measurement; Fine scratch; 光散乱; Fraunhoter回折; 非接触測定

Several non-contact optical techniques have been investigated for the measurement of fine surface roughness. Disadvantages of these techniques are (1) systematic errors of measurements occur, (2) it is rather difficult to apply to in-process measurement and (3) it requires a long time to perform the test.A new optical method based on the Fraunhofer diffraction theory is proposed, in which it is possible to estimate quantitatvely the fine surface roughness on the order of nanometeres of the surfaces generated by ultra-precision diamond turning without disadvantages mentioned above.The results obtained in this paper are summarized as follows :(1) A conventional equation which can accurately estimate the fine diamond turned surface roughness of less than 200nmRmax by measuring the intensity values of Oth-3rd order diffractions is derived from theoretical analysis based on the Fraunhofer diffraction. The Fraunhofer diffraction roughness R corresponding to the surface roughness (Rmax) can be determined from the following equation<<numerical formula>>where I_0-I_3 are intensities of the principal maximum in order of 0-3 diffractions, lambda is light wavelength.(2) From the measurements of surface roughness of a magnetic memory disk as well as various workpieces produced by diamond turning, this proposed Fraunhofer diffraction method makes it possible to measure the surface roughness from 1nm to the maximum 200nmRmax within an error range of 10%.(3) It is possible to evaluate the texture of a magnetic memory disk surface from the distribution map of the average Fraunhofer diffraction roughness during rotation, so that this method will be applied to in-process measurement of the ultra-fine surface roughness during turning operation.(4) This method can be applied to estimate quantitatively both the depth and the width of fine scratches of less than submicron in mirror surfaces, such as a silicon wafer surface.

已经研究了几种非接触式光学技术来测量精细表面粗糙度。这些技术的缺点是（1）测量存在系统误差，（2）应用于在线测量相当困难，（3）测试时间较长。提出了一种基于夫琅和费衍射理论的新光学方法，可以定量估计超精密产生的表面纳米量级的精细表面粗糙度。 本文得到的结果总结如下：(1)基于Fraunhofer衍射的理论分析，推导了通过测量Oth-3级衍射强度值可以准确估计小于200nmRmax的精细金刚石车削表面粗糙度的常规方程。与表面粗糙度（Rmax）相对应的弗劳恩霍夫衍射粗糙度R可以通过以下方程<<数学公式>>确定，其中I_0-I_3是0-3次衍射的主最大值的强度，lambda是光波长。（2）根据磁存储盘以及金刚石车削生产的各种工件的表面粗糙度的测量，提出了 夫琅和费衍射法使得可以在10%的误差范围内测量从1nm到最大200nmRmax的表面粗糙度。(3)可以从旋转过程中平均夫琅和费衍射粗糙度的分布图来评估磁存储盘表面的织构，因此该方法将应用于车削操作过程中超精细表面粗糙度的在线测量。(4)该方法可用于 用于定量估计镜面（例如硅晶片表面）中小于亚微米的细划痕的深度和宽度。

项目成果

Y. TAKAYA, T. MIYOSHI and K. SAITO: "Measurement of Ultra-fine Random Surface Roughness Based on Fraunhofer Diffraction" Journal of JSPE. 56[2]. 373-380 (1990)

Y. TAKAYA、T. MIYOSHI 和 K. SAITO：“基于 Fraunhofer 衍射的超细随机表面粗糙度测量”JSPE 杂志。

T. MIYOSHI and K. SAITO: "Non-Contact Measurement of Ultra-Precision Diamond Turned Surface Roughness," Bull. of JSPE. 23[3]. 182-188 (1989)

T. MIYOSHI 和 K. SAITO：“超精密金刚石车削表面粗糙度的非接触式测量”，Bull。

高谷 裕浩: "Fraunhofer回折による超精密加工面粗さの測定評価に関する研究" 精密工学会誌. 56[2]. 373-380 (1990)

Hirohiro Takatani：“利用弗劳恩霍夫衍射测量和评估超精密加工表面粗糙度的研究”，日本精密工程学会杂志 56[2]（1990 年）。

三好 隆志: "光デイスクスタンパのインプロセス計測法の開発研究" 第68期日本機械学会全国大会学術講演会論文集. Vol.D. 288-290 (1990)

Takashi Miyoshi：“光盘压模在线测量方法的开发”，第 68 届日本机械工程师学会全国会议论文集，第 288-290 卷（1990 年）。

T.MIYOSHI: "NonーContact Measurement of UltraーPrecision Diamond Turned Surface Roughness" Bull. of The Japan Society of Precision Engg.23[3]. 182-188 (1989)

T.MIYOSHI：“超精密金刚石车削表面粗糙度的非接触式测量”，日本精密工程学会公报，23[3]（1989 年）。