Artificial Control of Semiconductor Heterojunction Band Discontinuity
Artificial Control of Semiconductor Heterojunction Band Discontinuity
批准号:
03402022
负责人:
IKOMA Toshiaki
金额:
$14.08万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for General Scientific Research (A)
财政年份:
1991
资助国家:
日本
项目状态:
已结题
起止时间:
1991 至 1993
中文摘要
本文用X射线光电子能谱(XPS)和自洽紧束缚计算研究了Si层在GaAs/AlAs结构中的作用。研究发现,要控制异质结能带偏移,必须精确控制硅占据位,形成人工界面偶极子。然而,在目前的实验条件下,插入的Si原子分布在几个原子层上,主要作为施主杂质,这只会引起能带弯曲。或者,我们提出了联合收割机来改变两个间隔很近的δ掺杂层的能带偏移。霍尔测量表明,生长温度改变了仅用Si作为掺杂剂进行δ掺杂的(311)A取向GaAs的导电类型。在GaAs/AlAs异质结构中,掺杂p型和n型硅层的有效带偏移为-0.5eV,掺杂层间距为-5nm。实验表明,通过控制硅原子的位置,可以引入人工界面偶极子来实现对异质结能带偏移的控制。
英文摘要
Roles of Si layr at GaAs/AlAs structures have been studied by x-ray photoemission spectroscopy(XPS) and self-consistent tight-binding calculations. It is found that one has to precisely control the Si-occupying sites to from an artificial interface dipole to control heterojunction band offsets. However, under the present experimental condition, inserted Siatoms distribute over a few atomic layrs and mainly act as donor impurities, which introduce only a band bending.Alternatively, we proposed to combine two closely spaced delta-doping layrs to vary the band offsets. Hall measurements show that a growth temperature varies a conduction type of(311)A-oriented GaAs delta-doped with only Si as a dopant. The effective band offset is varied by -0.5eV at a GaAs/AlAs heterostructure with p-and n-type Si doping sheets with a narrow spacing of -5 nm. This experiment shows that by controlling atomic sites of inserted Si, we can introduce an artificial interface dipole to realize a control of heterojunction band offsets.
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Y.Hashimoto: "Roles of Si-Insertion Layer at GaAs/AlAs Heterointerface determined by X-ray Photoemission Spectroscopy" J.Vac.Sci.Tech. (to be published). (1994)
Y.Hashimoto:“通过 X 射线光电发射光谱确定 GaAs/AlAs 异质界面上硅插入层的作用”J.Vac.Sci.Tech。
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生駒 俊明: "半導体ヘテロ界面におけるバンド不連続の人為的制御" 生産研究. 45. 21-24 (1993)
Toshiaki Ikoma:“半导体异质界面能带不连续性的人工控制”Production Research 45. 21-24 (1993)。
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T.Saito: "Band Discontinuity and Effects of Si-Insertion Layer at(311)A GaAs/AlAs Interface" Solid-State Electronics. (to be Published). (1994)
T.Saito:“(311)A GaAs/AlAs 界面处的硅插入层的能带不连续性和影响”固态电子学。
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Y.Hashimoto: "Roles of Si insertion Layer at GaAs/AlAs heterointerface determined by X-ray photoemission Spectroscopy" J.Vac.Sci.Tech.(to be published). (1994)
Y.Hashimoto:“通过 X 射线光发射光谱确定 GaAs/AlAs 异质界面中 Si 插入层的角色”J.Vac.Sci.Tech.(待出版)。
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K.Agawa: "Electrical Properties of Heavily Si-doped GaAs grown on(311)A GaAs Surfaces by Molecular Beam Epitaxy" Proceedings of 20th Int'l Symp,GaAs and Related Compounds. (to be published). (1994)
K.Akawa:“通过分子束外延在 (311)A GaAs 表面生长的重硅掺杂 GaAs 的电性能”第 20 届国际研讨会论文集,GaAs 和相关化合物。
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共 27 条
Interference Effect of Electron Waves in Quantum Wires Fabricated by Focused Ion Beam Implantation
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批准号:01460072
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项目类别:Grant-in-Aid for General Scientific Research (B)
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资助金额:$3.26万
-
财政年份:1989
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负责人:IKOMA Toshiaki
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依托单位:
Fabrication of Vertical Field-Effect Transistor with a Superlattice Source by Using Focused Ion Beam
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批准号:01850079
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项目类别:Grant-in-Aid for Developmental Scientific Research (B).
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资助金额:$8.45万
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财政年份:1989
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负责人:IKOMA Toshiaki
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依托单位:
A Study on Ultrafine Doping by Focused Ion Beam Implantation
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批准号:60850058
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项目类别:Grant-in-Aid for Developmental Scientific Research
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资助金额:$8.0万
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财政年份:1985
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负责人:IKOMA Toshiaki
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依托单位:
海外基金