Development of High Speed Sub-Nanometer Positioning Table System for Future ULSI Production

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With the demands for higher machining accuracy and higher productivity, high speed ultraprecision positioning technologies are increasingly required. Especially, requirements for the table system of semiconductor equipment, such as a step and scan exposure system, are not only good positioning stability but also nanometer order tracking accuracy.In this research project, therefore, a high speed sub-nanometer positioning table system driven by a blushless DC linear motor and guided by an aerostatic bearing has been developed. As a result, the following available results could be obtained.(1) Yawing error of 1.5murad at traveling length of 300mm(2) Sub-nanometer order positioning resolution(3) Settling time of 0.34s for a 60mm point-to-point motion with a positioning error of less than 5nm(4) Tracking error (sigma) of 20nm at feed rate of 200mm/s