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Research into High Speed Ultraprecision Table System with Wideband Dynamic Stability

宽带动态稳定高速超精密工作台系统研究

基本信息

批准号：
12450056
负责人：
SHINNO Hidenori
金额：
$ 7.68万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2001
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12450056/
关键词：
Table System Ultraprecision Positioning Linear Motor Machine Tool Semiconductor Production Systems Repetitive Control Damping Capacity ER Fluid 熱特性

项目摘要

With the increasing demand for higher machining accuracy and higher productivity, high speed ultraprecision table positioning technology is urgently required. In order to meet these requirements, it is necessary and indispensable to realize the ultraprecision table system of non-contact type, which consists of an aerostatic guideway and a linear motor. However, such a table system of non-contact type has low performances in dynamic stability, because of friction free and low damping capacity.In this research project, therefore, the following new concepts for an ultraprecision table system have been proposed, and the performance of the developed table system with the proposed concepts has been evaluated.(1) An electrorheological fluid (ER fluid) damper has been proposed. As a result, the wideband dynamic stability of the nanometer positioning table system driven by a brushless DC linear motor and guided by an aerostatic bearing could be achieved.(2) An application of repetitive control method to a linear motor-driven aerostatic table system has been investigated. Through a series of positioning experiments, it was proved that the repetitive control method can restrain tracking error caused by various factors and the tracking error converges quickly on a minimum after a few repetitions.(3) We proposed a hybrid linear driving system constructed from a voice coil motor and a coarse driving mechanism, e.g., a wire drive mechanism. Furthermore, we actually developed a hybrid linear motor-driven aerostatic table system, and clarified availabilities of the proposed driving system for ultraprecision table system.

随着人们对加工精度和生产率要求的不断提高，对高速超精密工作台定位技术的需求日益迫切。为了满足这些要求，实现由空气静压导轨和直线电机组成的非接触式超精密工作台系统是必要的。然而，这种非接触式的工作台系统的动态稳定性低的性能，因为摩擦自由和低阻尼capacity.In本研究项目，因此，以下的新概念的超精密工作台系统已被提出，并与所提出的概念开发的工作台系统的性能进行了评估。(1)提出了一种电流变液阻尼器。结果表明，采用无刷直流直线电机驱动、空气静压轴承导引的纳米定位平台系统具有宽带动态稳定性。(2)研究了重复控制方法在直线电机驱动的气浮台系统中的应用。通过一系列的定位实验，证明了重复控制方法可以抑制各种因素引起的跟踪误差，并且经过几次重复后，跟踪误差很快收敛到最小值。(3)我们提出了一种由音圈电机和粗驱动机构构成的混合线性驱动系统，线驱动机构。此外，我们实际开发了一个混合线性电机驱动的空气静压工作台系统，并阐明了所提出的驱动系统的超精密工作台系统的可用性。